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Optical switch and production method therefor, information transmission device using

An optical switch and information transmission technology, applied in optics, microstructure devices composed of deformable elements, optical elements, etc., can solve problems such as difficulties and unstable translation control

Inactive Publication Date: 2005-05-25
PANASONIC CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0013] However, in the above-mentioned two publications, bending forces are respectively generated on the four cantilever beams 103, 123 around the reflecting mirrors 105, 122, and it is difficult to maintain the balance of these four bending forces and translate the reflecting mirrors 105, 122. It is easy to cause unstable translation control, and since the four cantilever beams 103, 123 are arranged symmetrically, once the bending forces of the four cantilever beams 103, 123 are out of balance, a rotational force may be generated immediately

Method used

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  • Optical switch and production method therefor, information transmission device using
  • Optical switch and production method therefor, information transmission device using
  • Optical switch and production method therefor, information transmission device using

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Embodiment approach 1

[0053] Figure 1A is a perspective view of an optical switch according to Embodiment 1 of the present invention, Figure 1B It is a perspective view of an optical switch according to a modified example of Embodiment 1 of the present invention. Figure 2A It is a cross-sectional view showing a part of the optical switch according to Embodiment 1 of the present invention.

[0054] On the substrate 7, the reflective element 1, the thin-film piezoelectric body 3 arranged symmetrically with respect to the rotation axis 9 on both sides of the reflective element 1, and the first thin-film piezoelectric body arranged on the reflective element side on the upper surface of each thin-film piezoelectric body 3 The upper electrode 4a, the second upper electrode 4b arranged away from the first upper electrode 4a on the opposite side of the reflection element on the upper surface of each thin film piezoelectric body 3, the lower electrode 4c arranged on the lower surface of each thin film p...

Embodiment approach 2

[0080] Figure 5A It is a perspective view of an optical switch according to Embodiment 2 of the present invention. In this second embodiment, along the surface of the substrate that constitutes the thin-film piezoelectric body, Figure 5A The reflective surface 1b is provided in the normal direction of the substrate surface, and the reflective element 1A is driven in the normal direction of the substrate surface. Each constituent element is basically the same as that described as the detailed description of Embodiment 1. Figure 1A It is the same, and the same code|symbol is given to the same component. The thin-film piezoelectric body 3 , electrodes 4 , and elastic body 5 constituting the piezoelectric element 2 have the same configuration as those in Embodiment 1, and therefore are not shown here. The electrode 4 is composed of two upper electrodes 4a, 4b similarly to the first embodiment, here, for the sake of simplification, it is shown as one electrode, but actually i...

Embodiment approach 3

[0090] Figure 7A , Figure 7B It is a top view and a side view of the information transmission device in Embodiment 3 of this invention. In Embodiment 3, the actuator is composed of a plurality of rows of piezoelectric elements 2 arranged in parallel along its longitudinal direction 8 , and a plurality of optical transmission lines 11 are arranged corresponding to the rows of the plurality of piezoelectric elements 2 . By employing such a configuration, a plurality of optical transmission lines 11 can be arranged at high density, and an optical switch including a plurality of optical transmission lines can be compactly configured.

[0091] In particular, an optical fiber used as an optical transmission line is generally used by bundling a plurality of fibers, and a connector at the terminal thereof is generally arranged in parallel with each fiber. Figure 7A In this case, a plurality of optical transmission lines 11 (specifically, transmission lines 11 a and 11 b ) are arr...

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Abstract

A piezoelectric element (2) composed of a reflective element (1), a thin film piezoelectric body (3), electrodes (4a, 4b, 4c), and an elastic body (5) is formed on a substrate (7). Voltage, the thin-film piezoelectric body deflects and deforms, driving the reflective element. A plurality of piezoelectric elements are arranged in parallel along the longitudinal direction (8), and a torsion spring (6) is arranged in a direction perpendicular to the longitudinal direction to connect and maintain the reflective element on the substrate. Furthermore, the reflective element is connected to the piezoelectric element through the strain absorbing part (10). According to this configuration, the torsion spring is used as the rotation axis (9), and the reflection element is tilted about the rotation axis.

Description

technical field [0001] The present invention relates to an optical switch and its manufacturing method, an information transmission device using the switch, and in particular to an optical switch having an actuator for driving a reflective element and an information transmission device using the switch. Background technique [0002] In recent years, with the development of high-speed transmission technologies such as frequency division multiple access, information transmission devices using light have become the key devices for realizing broadband Internet and enabling high-speed and large-capacity information communication. [0003] Furthermore, in order to efficiently connect an optical communication network, various optical switches having the function of an optical signal level switch and the function of an optical attenuator are indispensable devices. [0004] In the past, optical communication networks have been developed centering on infrastructure systems, but in the...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81B3/00G02B6/35G02B26/08
CPCG02B6/352G02B6/3556G02B6/356G02B6/3566G02B6/3578G02B26/0858
Inventor 横山和夫浅井胜彦入江庸介青木新一郎野村幸治森仲克也
Owner PANASONIC CORP
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