Multi-layer plane ionization chamber for measuring boundary dosage distribution of different material

A technology of dose distribution and ionization chamber, which is applied in measuring devices, radiation measurement, X/γ/cosmic radiation measurement, etc. It can solve the problems of X-ray interface dose distribution that have not been reported in the literature.

Inactive Publication Date: 2003-10-22
NORTHWEST INST OF NUCLEAR TECH
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  • Abstract
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Problems solved by technology

It has been reported abroad that using a multi-layer flat aluminum ionization chamber to measure the interface dose distribution of X-rays passing through different materials has not been reported in the literature.

Method used

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  • Multi-layer plane ionization chamber for measuring boundary dosage distribution of different material
  • Multi-layer plane ionization chamber for measuring boundary dosage distribution of different material
  • Multi-layer plane ionization chamber for measuring boundary dosage distribution of different material

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Embodiment Construction

[0023] see figure 1 , figure 2 , image 3 , the multi-layer flat ionization chamber includes internal components, front and rear two-layer terminal plates and the shell. The electrode plate of the ionization chamber is made of high-purity aluminum foil with a thickness of 0.005mm, with a total thickness of 0.04mm and a total of eight layers, which are pasted with epoxy resin On the plexiglass ring and connected with the outgoing wire of the copper wire slot on the ring, it is drawn out through a multi-head socket. The thickness of the plexiglass ring is 1.0mm, the inner diameter is 30mm, and the outer diameter is 70mm. There is a ventilation groove with a width of 1.0mm and a depth of 0.3mm on each ring, so that the cavity communicates with the atmosphere. Use three plexiglass bolts with a diameter of 6mm to fix all the annular insulating plates with electrode plates in a certain order to form the internal components of the ionization chamber. The front and rear end plates...

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Abstract

The invention refers to a multilayer plate ionization chamber measuring the interface dosage distribution of different material. In order to measure the dosage strengthening effect, it design a ionization chamber with high-purity aluminum foil as electrode board, the aluminum foil used as the electrode board and organic glass spaced with each other and set in the aluminum-made shell, and two-layer and polar plates being active structure and located on two sides of the ionization chamber, respectively; it can measure X-ray (30-100keV) interface dosage distribution for different material and thus know the X-ray damage strengthening gene for some devices.

Description

1. Technical field: [0001] The invention relates to a multi-layer flat ionization chamber for measuring the dose distribution of different material interfaces, specifically for measuring the low-atom density within tens of μm near the interface when X-rays with an energy of 30-100keV are incident on the interface of materials with different atomic numbers. A multi-layer flat-plate ionization chamber was designed based on the dose-enhancing effect produced in ordinal materials. 2. Background technology: [0002] With the rapid development of semiconductor integrated circuit technology, in order to improve device performance, many VLSIs introduce heavy metal technology into the chip manufacturing process; in order to improve device reliability, many integrated circuit packaging covers are coated with a layer of gold Au (such as Kovar package structure) , forming a high atomic number (such as Au, W, etc.) and device sensitive area (mainly composed of SiO 2 or Si) interfaces wi...

Claims

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Application Information

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IPC IPC(8): G01T1/185
Inventor 郭红霞吴国荣韩福斌陈雨生周辉
Owner NORTHWEST INST OF NUCLEAR TECH
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