Two-dimensional piezoelectric driving platform for suppressing orthogonal disturbance

Abstract

The invention provides a two-dimensional piezoelectric driving platform for inhibiting orthogonal disturbance, which comprises a substrate and a working platform, four groups of flexible isolation structures are arranged in an X-Y orthogonal plane by taking the center of the working platform as an original point, and the flexible isolation structures are connected with the working platform through a guide mechanism. Piezoelectric driving units are arranged on the sides, away from the working platform, of the orthogonal flexible isolation structures respectively, each piezoelectric driving unit comprises a U-shaped groove, two piezoelectric stacks and a center block, the U-shaped grooves are formed in the substrate and connected with the two ends of the flexible isolation structures, the center blocks are connected with the middles of the outer sides of the flexible isolation structures, and the two ends of each piezoelectric stack are provided with ball heads. The two ends of the piezoelectric stack abut against the inner side wall of the U-shaped groove and the side face of the center block respectively. The anti-disturbance capability of the piezoelectric driving unit is enhanced through the flexible isolation structure, and the situation that the piezoelectric driving unit in the X (Y) direction deflects and cannot work normally due to the fact that lateral force is brought to the piezoelectric driving unit in the Y (X) direction when the piezoelectric driving unit in the X (Y) direction works is avoided.

Description

technical field [0001] The invention relates to the technical field of parallel two-dimensional piezoelectric driving platforms, in particular to a two-dimensional piezoelectric driving platform that suppresses orthogonal disturbances. Background technique [0002] In the field of aerial imaging, due to the large relative velocity between the imaging system and the target, and the existence of the aircraft's own vibration, the imaging is blurred. At this stage, the clear and stable imaging of the imaging system can be achieved by adjusting the boresight of the optical lens in the optical system through the piezoelectric drive platform. [0003] Document [Optical Precision Engineering, 2017, 25(6): 1494-1501] discloses a two-way actuation large-stroke two-degree-of-freedom image stabilization mechanism, which connects piezoelectric drive units in two directions to a work platform through a flexible hinge , by synthesizing the displacement outputs in two vertical directions t...

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Problems solved by technology

[0008] The purpose of the present invention is to provide a two-dimensional piezoelectric drive platform that suppresses orthogonal disturbances. The piezoelectric drive platform can achieve anti-orthogonal disturbances, stabilize output displacement as the goal, and solve the problem of the small output stiffness of traditional parallel piezoelectric actuators. , the stroke is easily affected by load changes, and there is a problem of orthogonal disturbance between piezoelectric drive units

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