Semiconductor process equipment
A technology of process equipment and semiconductors, applied in semiconductor/solid-state device manufacturing, electrical components, circuits, etc., can solve problems such as time-consuming, long-term, and affecting chamber process efficiency, and achieve the effect of shortening the time used
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[0027] In order to make those skilled in the art better understand the technical solutions of the present invention, the semiconductor process equipment provided by the present invention will be described in detail below with reference to the accompanying drawings.
[0028] This embodiment proposes a semiconductor process equipment, including a process chamber and an electrostatic chuck disposed in the process chamber, and a plurality of bumps are provided on the bearing surface of the electrostatic chuck to support the wafer; The material usually has the characteristics of high strength and not easy to bend, so when the wafer is adsorbed on the carrier surface, the wafer only receives the support force from multiple bumps, and does not contact the non-bump area in the carrier surface, Therefore, by reducing the contact area with the bearing surface, the impact of micro particles on the wafer is reduced.
[0029] Please refer to figure 1 , the above-mentioned semiconductor pr...
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