Cascade backstop device and MEMS sensor

Abstract

The invention provides a cascade backstop device and an MEMS sensor, the cascade backstop device comprises an anchor point, at least two first backstop units and at least one second backstop unit, the anchor point is in contact with the first backstop units, the first backstop units and the second backstop units are sequentially connected at intervals, and the first backstop units are in contact with the second backstop units. The number of the first stop units is one more than that of the second stop units; on the plane perpendicular to the cascade direction of the cascade backstop device, the projection contour of the first backstop unit is located on the inner side of the projection contour of the anchor point, and the projection contour of the first backstop unit is located on the inner side of the projection contour of the second backstop unit. When the MEMS sensor is collided, a buffering protection effect can be achieved, adhesion is avoided, and the reliability of the sensor is improved.

Description

technical field [0001] The invention relates to the technical field of semiconductor devices, in particular to a cascade stopper device and a MEMS sensor. Background technique [0002] MEMS sensors have the advantages of small size, low cost, and mass production, so they are widely used in consumer electronics, automotive electronics, aerospace and other fields. However, when the MEMS sensor is subjected to excessive impact during operation, it will generate a large displacement, which will lead to structural fracture and affect the performance of the device. The existing solution is to use a stopper to limit the displacement of the inertial sensor. However, in most of the solutions, the stop part is in hard contact with the movable structure, and debris is easily generated, which further affects the normal operation of the inertial sensor. [0003] Therefore, it is necessary to provide a new type of cascade stopper device and MEMS sensor to solve the above problems existin...

AI Technical Summary

Problems solved by technology

However, when the MEMS sensor is subjected to excessive impact, it will cause a large displacement and cause structural fracture, which will affect the performance of the device. The existing solution is to use a stopper to limit the displacement of the inertial sensor

However, in most solutions, the stopper part is in hard contact with the movable structure, which is prone to debris and further affects the normal operation of the inertial sensor

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