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Ultrahigh vacuum two-dimensional material preparation system and preparation method

A two-dimensional material, ultra-high vacuum technology, used in nanostructure manufacturing, nanotechnology, nanotechnology and other directions to avoid pollution and avoid oxidation

Pending Publication Date: 2022-06-24
YISHENG SCI INSTR (JIAXING) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to solve or at least alleviate the problems existing in the prior art

Method used

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  • Ultrahigh vacuum two-dimensional material preparation system and preparation method
  • Ultrahigh vacuum two-dimensional material preparation system and preparation method
  • Ultrahigh vacuum two-dimensional material preparation system and preparation method

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Experimental program
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Effect test

Embodiment 1

[0041] The embodiment of the present invention provides an ultra-high vacuum two-dimensional material preparation system. Figure 1-6 , including the system bracket 1 as the installation platform, on the system bracket 1 is installed the ultra-high vacuum chamber 3 through the fixing frame 2, the ultra-high vacuum chamber 3 is made of high-quality 316 stainless steel, and the leakage rate of the chamber is lower than 1× 10 -10 mbar·L / s, the ultra-high vacuum chamber 3 is provided with:

[0042] The vacuum chamber door 4 is used for rapid replacement of two-dimensional material samples inside and outside the ultra-high vacuum chamber 3;

[0043] The telephoto microscope 5 is used to observe the prepared two-dimensional material sample;

[0044] The vacuum pump set is used to evacuate the inner cavity of the ultra-high vacuum chamber 3 and maintain the ultra-high vacuum environment of the inner cavity of the ultra-high vacuum chamber 3; in this embodiment, the vacuum pump set ...

Embodiment 2

[0055] The difference between this embodiment and Embodiment 1 is that, such as Figure 1-4 As shown, the ultra-high vacuum chamber 3 is provided with interconnecting pipes 9 that can be connected with other chambers, for transferring the prepared two-dimensional material samples to other ultra-high vacuum chambers for testing, and the interconnecting pipes 9 There is a first gate valve 10 on it that cuts off the connection between other cavities and the ultra-high vacuum cavity 3, which ensures that the prepared two-dimensional material can be transferred to other cavities for testing by testing equipment without exposing to the atmosphere. In order to reflect the most essential characteristics of two-dimensional materials during testing.

[0056] For other undescribed structures, refer to Embodiment 1.

Embodiment 3

[0058] The present invention also provides a preparation method for preparing two-dimensional materials by using an ultra-high vacuum two-dimensional material preparation system, comprising the following steps:

[0059] S1. Adhering the two-dimensional material sample to the substrate of the first sample holder 24 by PDMS (polydimethylsiloxane), and loading the first sample holder 24 on the mechanical gripper 19, and passing the The opened vacuum chamber door 4 is sent into the ultra-high vacuum chamber 3, and then the vacuum chamber door 4 is closed;

[0060] S2. Turn on the vacuum pump set composed of the molecular pump 6 and the mechanical pump 7 to evacuate the inner cavity of the ultra-high vacuum chamber 3. After the inner cavity of the ultra-high vacuum chamber 3 reaches the ultra-high vacuum environment, keep the first sample holder 24 The two-dimensional material sample adhered to the top is in an ultra-high vacuum environment;

[0061] S3. Manipulate the sample rack...

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Abstract

The invention provides an ultrahigh vacuum two-dimensional material preparation system and a preparation method, and aims to solve the problems that the two-dimensional material is prepared by an existing mechanical stripping method generally in an atmospheric environment, the two-dimensional material is easily oxidized by oxygen in the atmosphere, the properties of the prepared two-dimensional material are further changed, and the preparation cost is reduced. The ultrahigh vacuum two-dimensional material preparation system comprises a system support, an ultrahigh vacuum cavity is installed on the system support through a fixing frame, and a two-dimensional material operation mechanism used for preparing a two-dimensional material sample in an ultrahigh vacuum environment is arranged in an inner cavity of the ultrahigh vacuum cavity. The ultrahigh vacuum cavity is provided with a vacuum cavity door; a telephoto microscope; the vacuum pump set is used for vacuumizing the inner cavity of the ultrahigh vacuum cavity; a vacuum gauge; an observation window; a sample rack sample transfer rod; and the sample gripper comprises a sample transfer rod. The method is particularly suitable for fine preparation of two-dimensional materials, and has high social use value and application prospects.

Description

technical field [0001] The invention relates to the technical field of two-dimensional material preparation, in particular to an ultra-high vacuum two-dimensional material preparation system and a preparation method. Background technique [0002] Two-dimensional materials are usually only one or a few atomic layers thick. The existing methods of preparing two-dimensional materials by mechanical exfoliation are generally carried out in an atmospheric environment, and oxygen in the atmosphere can easily oxidize two-dimensional materials, thereby changing all the materials. Due to the properties of the prepared two-dimensional materials, it is impossible to obtain accurate two-dimensional material observation and detection data. At the same time, the existing two-dimensional material preparation systems are usually driven by stepper motors, which are relatively large in size, relatively bulky, and difficult to apply. [0003] To this end, we propose an ultra-high vacuum two-dim...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B82B3/00
CPCB82B3/0004B82B3/0047
Inventor 田悦李净张宇马诚杰沈敏敏王城程
Owner YISHENG SCI INSTR (JIAXING) CO LTD
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