Line spectrum confocal sensor

Abstract

The invention discloses a line spectrum confocal sensor which comprises a light source, a light source optical fiber, a dispersion objective lens, a spectrograph and a spectrograph optical fiber. The dispersion objective lens comprises a first lens, a second lens, a third lens, a fourth lens, a fifth lens, a sixth lens, a seventh lens, an eighth lens, a ninth lens, a tenth lens and an eleventh lens which are sequentially and coaxially arranged from the dispersion objective lens to a dispersion objective image, and the spectrograph optical fiber transfers reflected light of a measured object to the spectrograph in a one-to-one correspondence mode. The spectrograph distinguishes the wavelengths of the echoes, and images are generated at different pixel positions on the camera; the dispersion objective lens is composed of eleven lenses and is designed to be of a double-telecentric structure, the consistency of brightness and precision of measurement light spots projected to a measured object is effectively guaranteed, dispersion, emission and receiving in the same optical path under the coaxial optical path are achieved, the measurement range is large, angle adaptability is good, and the working distance is long.

Description

technical field [0001] The invention belongs to the field of optical measurement, in particular to a line spectrum confocal sensor. Background technique [0002] With the rapid development of precision and ultra-precision manufacturing, the demand for high-precision detection is also increasing, so high-precision displacement sensors have also emerged. The precision of the ultra-precise displacement sensor can reach the micron level; although the traditional contact measurement also has high precision, it may scratch the surface of the measured object, and when the measured object is a weak rigid or light soft material, Contact measurement will also cause elastic deformation and introduce measurement errors. In addition, contact measurement is slow and difficult to achieve automated measurement. Based on the shortcomings of contact measurement, non-contact displacement sensors have received greater attention. [0003] Using the spectral confocal displacement sensor, the ext...

AI Technical Summary

Problems solved by technology

[0006] The purpose of the present invention is to provide a line-spectrum confocal sensor to solve the problems of small measurement range, poor angle adaptability, and short working distance when the line-spectrum confocal sensor in the prior art measures objects.

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