Support unit and apparatus for processing substrate
A technology for supporting units and supporting substrates, applied to electrical components, ohmic resistance heating devices, circuits, etc., can solve problems such as temperature rise of the driving device, failure to drive the driving device normally, failure of the driving device, etc., and achieve the minimum excessive rise effect
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[0045] Hereinafter, exemplary embodiments of the present invention will be described more fully hereinafter with reference to the accompanying drawings, in which exemplary embodiments of the present invention are shown. However, the present invention can be variously implemented and is not limited to the following examples. In the following description of the present invention, detailed descriptions of known functions and constructions incorporated herein are omitted to avoid making the subject matter of the present invention unclear. Also, for components having similar functions and roles, the same reference numerals are used throughout the drawings.
[0046] Unless expressly stated to the contrary, the term "comprise" and variations such as "comprises" or "comprising" are understood to imply the inclusion of stated elements but not the exclusion of any other elements. It should be understood that the terms "comprising" and "having" are intended to specify the presence of fe...
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