Three-dimensional pressure sensor based on flexible tactile capacitor

Abstract

The invention provides a three-dimensional pressure sensor based on a flexible tactile capacitor, which is characterized in that a spherical contact end is positioned above a flexible upper substrate, and a capacitor upper electrode layer, an inter-electrode dielectric layer, a capacitor lower electrode layer and a flexible lower substrate layer are sequentially positioned below the flexible upper substrate of the three-dimensional pressure sensor from top to bottom; the capacitor upper electrode layer is located on the lower surface of the flexible upper substrate layer of the three-dimensional pressure sensor, the tough supporting cylinders, the tough supporting gaskets and the inter-electrode dielectric layer are located on the same layer and jointly form a flexible support layer, the tough supporting cylinders are located in gap areas at the four vertex angles of the inter-electrode dielectric layer, and the tough supporting gaskets are located in the gap areas at the four vertex angles of the inter-electrode dielectric layer. The tough supporting gasket is located in a gap area in the center of the inter-electrode dielectric layer; the sensor can sense applied normal force, shearing force and pulling force respectively, large-dimension pressure sensing is achieved, and high sensitivity is achieved.

Description

technical field [0001] The invention relates to the technical field of sensors, in particular to a three-dimensional pressure sensor based on flexible tactile capacitance. Background technique [0002] With the rapid development of the sensor industry, the emergence of flexible three-dimensional pressure sensors makes it more convenient to research on bionic skin, robot tactile sensing, etc. Among them, capacitive sensors have good temperature stability, good dynamic response, low cost, and can be measured by point contact. And the advantages of high sensitivity, is one of the most commonly used devices in three-dimensional pressure sensing applications. The capacitance of a capacitive sensor is affected by the plate gap, the electrode facing area and the inter-electrode medium. In pressure sensing research, it is relatively contradictory to retain high capacitance sensitivity and measurement accuracy, maintain sensor flexibility and measurement stability. At the same time,...

AI Technical Summary

Problems solved by technology

However, the above-mentioned patents fail to realize the sensing function of monitoring normal force, tangential force and tension while ensuring the flexibility of the sensor and the service life of pressure sensing

[0005] Although capacitive sensing that monitors normal and tangential forces has been extensively studied, the present three-dimensional pressure sensor, which is soft, tough, and light-transmitting, can simultaneously detect normal, shear, and tensile forces The research is still relatively lacking, and the cost of adoption is high, which is not conducive to large-scale commercial practical application

[0006] To sum up, sensors are now developing toward miniaturization, flexibility, and high precision. However, the invention of capacitive flexible sensors capable of three-dimensional force measurement has been limited due to problems such as high cost, large size, and difficulty in wearing and integrating. This makes it difficult to use on a large scale, which also limits the wide application of flexible capacitive sensors to a certain extent; at the same time, it is also technically challenging to take into account flexibility (wearability), toughness (service life), high precision and low cost, so It is urgent to design a sensor with better performance

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