Blade height measuring device and dicing saw

Abstract

The invention discloses a blade height measuring device and a dicing saw, and the device comprises a base which is provided with a water inlet channel and an air inlet channel; the optical fiber sensor assembly comprises a mounting seat connected with the base and an optical fiber sensor, the optical fiber sensor comprises a transmitting end prism and a receiving end prism which are oppositely mounted on the mounting seat at an interval, and the transmitting end prism emits light to the receiving end prism; the cleaning structure is arranged on the base, the cleaning structure comprises at least two water blowing pipes and at least two air blowing pipes, water inlets of the water blowing pipes are communicated with the water inlet channel, water blowing openings of one part of the water blowing pipes face the transmitting end prism, and water blowing openings of the other part of the water blowing pipes face the receiving end prism; air inlets of the air blowing pipes are communicated with the air inlet channel, air blowing openings of one part of the air blowing pipes face the transmitting end prism, and air blowing openings of the other part of the air blowing pipes face the receiving end prism.

Description

technical field [0001] The present application relates to the technical field of dicing machine cutting, in particular to a blade height measuring device and a dicing machine. Background technique [0002] In the field of semiconductor processing, especially in the field of wafer processing, the accuracy of the cutting depth of the workpiece is very high, but because the cutting blade will be worn along with the cutting process, the outer diameter of the cutting blade will become smaller, which will affect the accuracy of the workpiece. Depth of cut. In order to measure the wear value of the cutting blade during the cutting process, so as to accurately control the cutting depth of the workpiece and ensure the precision of the workpiece processing, a height measuring system is set up to measure the wear value of the blade. The height measuring system mainly includes the light emitting end and the receiving end. The whole height measuring system is fixed, and the main shaft s...

AI Technical Summary

Problems solved by technology

[0003] However, the cleaning structure in the current altimetry system does not work well for prism cleaning.

Since the cutting cavity is filled with water mist and cutting dirt, the prism will be seriously polluted, and the cleaning effect of the cleaning structure is not good or unstable, which will greatly affect the measurement accuracy of the height measurement system, thereby affecting the workpiece depth of cut

The cleaning structure in the current altimetry system will have the problem that the blown clean water will gather around the prism, causing interference to the optical path, thus affecting the accuracy of the measurement results of the altimetry system

And the water blown out of the cleaning structure is due to the residual pressure. After the control valve is closed, the water flow of the entire waterway will still slowly overflow from the blowing nozzle. , the overflowing water droplets will be blown to the prism together, affecting the light transmittance and thus affecting the measurement accuracy

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