Non-vision-field single-pixel imaging system and glossy surface defect detection method

Abstract

The invention relates to a non-vision-field single-pixel imaging technology and a glossy surface defect detection method, a system comprises a projector and a detector, and further comprises a diffuse reflection wall, and the diffuse reflection wall is opposite to a mirror-like material; the projector is responsible for coding the substrate pattern and then projecting the coded pattern on the surface of the mirror-like object, the included angle between the light of the projector and the mirror-like material is kept at a set angle alpha, and the focal length and the distance of the projector are adjusted, so that the display definition of the substrate pattern on the mirror-like object meets the set requirement; the detector is used for receiving light reflected by the diffuse reflection wall. According to the non-vision-field single-pixel imaging system and the glossy surface defect detection method, the mirror reflection phenomenon is overcome, the intensity of reflected light is balanced, and a single detector can capture all surface reflected light from a glossy surface at one position; that is, the non-vision-field single-pixel imaging system can perform ideal imaging on the smooth surface under the condition that the non-vision-field single-pixel imaging system is not influenced by the virtual image of the surrounding environment.

Description

technical field [0001] The invention relates to the technical field of glossy surface defect detection, in particular to a non-visual single-pixel imaging system and a glossy surface defect detection method. Background technique [0002] With the development of surface measurement and manufacturing technology, mirror-like materials have been widely used in precision machinery, optical components and chip manufacturing. With the increasing precision of manufacturing in modern industry, in many cases, the difficulty of detecting such smooth surfaces hinders the development of manufacturing technology, and even becomes a bottleneck restricting the manufacture of high-precision objects [0003] At present, the detection methods of glossy surfaces are mainly divided into two categories: one is contact measurement represented by atomic force microscope (AFM). This method has high measurement accuracy, but the contact measurement may damage the measurement surface, the measurement...

AI Technical Summary

Problems solved by technology

Finally, due to the uneven distribution of light intensity due to specular reflection, the camera is saturated at this time, and the highlighted areas in the final image will affect the inspection of other areas

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