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Detection method for internal atmosphere of vacuum packaging device, airtight container and detection equipment

A technology of vacuum encapsulation and internal atmosphere, applied in instruments, measuring devices, scientific instruments, etc., can solve the problems of difficult detection and low total amount of internal atmosphere, etc.

Pending Publication Date: 2022-04-12
CHINA ELECTRONICS PROD RELIABILITY & ENVIRONMENTAL TESTING RES INST THE FIFTH ELECTRONICS RES INST OF MIITCEPREI LAB
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Based on this, it is necessary to provide a detection method for the internal atmosphere of vacuum packaged devices, an airtight container and a detection device for the internal atmosphere of vacuum packaged devices, so as to solve the problem that the total amount of internal atmosphere of vacuum packaged devices is very small, and traditional internal atmosphere detection equipment and methods that are difficult to detect

Method used

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  • Detection method for internal atmosphere of vacuum packaging device, airtight container and detection equipment
  • Detection method for internal atmosphere of vacuum packaging device, airtight container and detection equipment
  • Detection method for internal atmosphere of vacuum packaging device, airtight container and detection equipment

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Effect test

Embodiment 1

[0073] This embodiment provides an airtight container, including a pumored cavity, and a damaged mechanism.

[0074] The airtight chamber includes a cavity body and a sealing cover. The cavity body is provided with an inlet, and the vacuum package device to be tested is loaded into the cavity body. The sealing cover is used to cover the load in an inlet to form a sealed state in the airtight cavity.

[0075] The damage mechanism includes a drive member and a force of the force. The drive member is connected to the cavity wall of the airtight cavity. The shroud member is connected to the drive member. The force of the force is a piercing needle, and the drive member is used to drive the urging member to puncture the vacuum package device and destroy its housing.

Embodiment 2

[0077] This embodiment provides an airtight container, including an airtight cavity, a constant mechanism, and a damaged mechanism.

[0078] The airtight chamber includes a cavity body and a sealing cover. The cavity body is provided with an inlet, and the vacuum package device to be tested is loaded into the cavity body. The sealing cover is used to cover the load in an inlet to form a sealed state in the airtight cavity.

[0079] The limiting mechanism is a clamping member, which is disposed on the inner wall of the airtight cavity for clamping the vacuum package device in the airtight cavity, and performs a limit.

[0080] The damage mechanism includes a drive member and a force of the force. The drive member is connected to the cavity wall of the airtight cavity. The shroud member is connected to the drive member. The shroud is used to cut the knife, and the drive member is used to drive the urging member to cut the vacuum package device, and destroy its housing.

Embodiment 3

[0082] This embodiment provides an airtight container, including an airtight cavity, a constant mechanism, and a damaged mechanism.

[0083] The airtight chamber includes a cavity body and a sealing cover. The cavity body is provided with an inlet, and the vacuum package device to be tested is loaded into the cavity body. The sealing cover is used to cover the load in an inlet to form a sealed state in the airtight cavity.

[0084] The limiting mechanism is a bond, disposed on the inner wall of the airtight cavity, and is used to adhere the vacuum package device in the airtight cavity to limit it.

[0085] The damage mechanism includes a drive member and a force of the force. The drive member is connected to the cavity wall of the airtight cavity. The shroud member is connected to the drive member. The force of the shock hammer is used to drive the shock of the vacuum packaging device to drive the urging member.

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Abstract

The invention relates to a method for detecting the internal atmosphere of a vacuum packaging device, an airtight container and detection equipment. According to the method for detecting the internal atmosphere of the vacuum packaging device, the vacuum packaging device is placed in the airtight container, the airtightness of the vacuum packaging device is damaged, the internal atmosphere of the vacuum packaging device is mixed with the internal atmosphere of the airtight container, and extremely little atmosphere in the vacuum packaging device is mixed into enough atmosphere. The internal air pressure of the airtight container is higher than that of the vacuum packaging device, the mixed atmosphere can be detected through a conventional method, and due to the fact that the internal atmosphere of the airtight container is known, after the mixed atmosphere is detected, the components and the content of the components of the internal atmosphere of the vacuum packaging device can be calculated. According to the detection method, the limitation of existing detection equipment can be broken through, quantitative testing of the internal atmosphere of the vacuum packaging device is achieved, and improvement of the vacuum packaging device technology and work such as DPA, failure analysis and mechanism analysis reliability research can be effectively supported.

Description

Technical field [0001] The present invention relates to the field of gas detection techniques, and more particularly to detecting methods of detecting methods, an airtight container, and an atmosphere of a vacuum packaging device within a vacuum packaging device. Background technique [0002] Vacuum packages for electronic components (such as MEMS devices, Micro-Electro-MeChanical System) can significantly improve device performance. However, the vacuum encapsulating device may not reach a predetermined vacuum effect during the manufacturing process, or degradation of vacuum effects during use, and causing deterioration of product performance and even fail. For the above problems, it is necessary to improve the vacuum package yield and reliability, and require measurement analysis of the internal atmosphere of the electronic components of the vacuum package to determine the types and content of the vacuum encapsulation. The internal atmosphere detection of the vacuum package devi...

Claims

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Application Information

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IPC IPC(8): G01N27/62G01N33/00
Inventor 董显山周斌赖灿雄黄云恩云飞尧彬肖庆中黄权李键珂
Owner CHINA ELECTRONICS PROD RELIABILITY & ENVIRONMENTAL TESTING RES INST THE FIFTH ELECTRONICS RES INST OF MIITCEPREI LAB
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