System and method for diagnosing plasma parameters

Abstract

The invention provides a system and method for diagnosing plasma parameters, and relates to the technical field of plasmas. The system for diagnosing the plasma parameters comprises a vacuum electrode, a data processing device, a data collecting device, a gas environment maintaining device, a Langmuir probe and a glow discharge tube, a vacuum electrode is arranged in the glow discharge tube; the gas environment maintaining device is connected with the glow discharge tube and is suitable for providing a gas environment required by glow discharge; the Langmuir probe is connected to the data processing device through the data collection device; the data collection device is suitable for collecting voltage and air pressure data; the data processing device is suitable for diagnosing plasma parameters through the voltage and the air pressure. According to the technical scheme, plasma parameters are diagnosed through the voltage provided by the Langmuir probe and the air pressure provided by the gas environment maintaining device, an artificial neural network can be combined, a computer data processing method of machine learning and a diagnosis method of the Langmuir probe are combined, and the diagnosis accuracy is improved.

Description

technical field [0001] The present invention relates to the field of plasma technology, in particular to a system and method for diagnosing plasma parameters. Background technique [0002] Plasma is generated by means of high temperature, high pressure, etc., and the long-range force between charged particles plays a leading role. The ionized matter with collective effect has the property of electrical neutrality as a whole, and is often called the fourth state of matter. Since the plasma contains a large number of charged particles (positive ions, negative ions, and electrons) and neutral particles (atoms, molecules, free radicals, and active groups), the electric and magnetic fields inside the plasma are extremely complex. [0003] The traditional Langmuir probe diagnosis method is to apply a variable voltage inside the plasma through a metal probe, and obtain various parameters of the plasma by correspondingly processing the voltage-current characteristic curve collected ...

AI Technical Summary

Problems solved by technology

Due to the extremely complex electric field and magnetic field environment inside the plasma, the electric field caused by the voltage applied to the metal probe interacts with the electric field and magnetic field inside the plasma, which limits the diagnostic accuracy and diagnostic accuracy of the traditional Langmuir probe diagnostic method. scope

The existing method of correcting the diagnostic results of probes through program means is highly dependent on the existing results of the probes, the improvement effect is not obvious, and it will also reduce the time resolution of the probes; and by improving the structure of the probes itself and material methods, while improving the diagnostic accuracy and range of a certain parameter, it will inevitably affect the diagnosis of other parameters, and cannot be applied in a large range

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