Multi-axis coupling hysteresis prediction method for piezoelectric actuator of atomic force microscope

Abstract

The invention discloses a multi-axis coupling hysteresis prediction method for a piezoelectric actuator of an atomic force microscope, which comprises the following steps of: acquiring a displacement time sequence generated by coupling of a Y axis of an X axis of a piezoelectric tube scanner of the atomic force microscope, lifting original data to a high-dimensional space by using an observation function and a Koopman operator, expressing a multi-axis coupling nonlinear relationship by using a linear equation, and predicting the hysteresis of the piezoelectric actuator of the atomic force microscope. Wherein a Hank matrix is constructed by utilizing lifting data, modal information of a system is obtained by utilizing two-time dimensionality reduction, and finally, establishment of a multi-axis coupling model is realized. According to the prediction method designed by the invention, multi-axis coupling of the piezoelectric tube scanner of the atomic force microscope can be modeled, multi-axis coupling displacement can be predicted, high-speed and high-precision imaging of the atomic force microscope can be effectively improved in later control, and the method can be popularized in other piezoelectric ceramic driver products.

Description

technical field [0001] The invention belongs to the field of precision manufacturing, and more specifically relates to a method for predicting multi-axis coupling hysteresis of an atomic force microscope piezoelectric driver. Background technique [0002] The atomic force microscope is a nanoscale surface topography measurement equipment, which is widely used in micro-nano measurement imaging and manufacturing, and its scanning imaging effect depends largely on the positioning accuracy of the piezoelectric tube scanner. Due to the unique properties of the piezoelectric material of the piezoelectric tube scanner, there is a complex coupling hysteresis effect between multiple axes, which seriously restricts its image-level scanning imaging and measurement accuracy. [0003] In the traditional piezoelectric tube scanner control method, the multi-axis coupling hysteresis is usually regarded as a disturbance, and a feedback controller such as H ∞ Control, PID control, etc. are e...

AI Technical Summary

Problems solved by technology

[0004] Aiming at the above defects or improvement needs of the prior art, the present invention provides a multi-axis coupling hysteresis prediction method for atomic force microscope piezoelectric actuators, thereby solving the technical problem that it is difficult to accurately measure multi-axis coupling hysteresis

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