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Trimethylgallium on-line analysis device and analysis method thereof

A trimethylgallium and analysis device technology, which is applied in the field of trimethylgallium online analysis devices, can solve the problems of inflexible connection of sampling analysis, trimethylgallium sampling and analysis, etc., achieve convenient and efficient sample recovery, avoid interference, exhaust gas, etc. receive convenient effects

Active Publication Date: 2022-01-18
安徽亚格盛电子新材料有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This patent uses a moving sampler to sample and re-analyze the hydrate formation kettle, but the characteristics of trimethylgallium cannot be sampled and analyzed after formation, and it needs to be stored. Traditional sampling often disassembles and assembles the sampling bottle, and each process stage Flexible and efficient sampling and analysis. Previously, each sample was sampled for 2 hours and analyzed for 2 hours. The sampling and analysis could not be connected flexibly. After the analysis, the sampling bottle needs to be recycled. Therefore, it is necessary to match the online analysis device of the trimethylgallium storage tank, so It is necessary to solve this problem

Method used

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  • Trimethylgallium on-line analysis device and analysis method thereof

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Embodiment 1

[0027] like figure 1 As shown, the present embodiment provides a trimethylgallium online analysis device, including a trimethylgallium storage tank 4, the trimethylgallium storage tank 4 is connected to the gas chromatograph 11 through a pipeline one 14, and the pipeline one 14 connected to the sampling bottle 5, the gas chromatograph 11 is connected to the absorption tank 8 by the pipeline two 15, and the absorption tank 8 is connected with the vacuum pump 13; the pipeline one 14 and the pipeline two 15 are also connected by the pipeline three 16; the sampling The bottle 5 is covered with a heating pack 6, and the bottom of the sampling bottle 5 is provided with an electronic scale 7; the absorption tank 8 is provided with a cold hydrazine 9, and liquid nitrogen is poured into the cold hydrazine 9 for cooling; the pipeline one 14 is also connected with The mass flow meter 3 and the pressure gauge 10 are connected to the mass flow meter 3 with a pressure reducing valve 2 conne...

Embodiment 2

[0030] This embodiment provides a trimethylgallium online analysis method:

[0031] Step 1: Front replacement: first turn on the vacuum pump 13, close the valves V1, V2, V3, V7, V8, and V9, open the valves V4, V5, V6, V10, V11, V12, and V13, and set the pressure of the pressure reducing valve to 20.4 Mpa, open the valve V2 to replenish nitrogen until the pressure gauge 10 shows 0.4Mpa, then close it, open the valve V7 and then close it after evacuating for 5 minutes, this is a replacement, repeat the operation 5 times to complete the replacement, and finally close the valves V5, V6, V10, V11, the replacement After completion, ensure that the pipeline is not disturbed by other impurities.

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Abstract

The invention discloses a trimethylgallium on-line analysis device and an analysis method thereof. According to the trimethyl gallium on-line analysis device and the analysis method thereof, continuous multiple sampling can be carried out, sample recovery is convenient and efficient, pretreatment can be carried out on a pipeline before analysis requirements, the result can be completed within one hour, a sampling bottle does not need to be disassembled, tail gas receiving is also convenient, post replacement is carried out on the analysis result, and interference on subsequent analysis is avoided. The device is provided with a plurality of lines and a plurality of valves, a plurality of process lines are combined, a plurality of analysis pipelines are connected in parallel, and on-line sample analysis of the process lines can be carried out in a short time, so that seven functional steps of pre-replacement, blank test, sampling, analysis, tail gas receiving, sample recovery and post-replacement can be realized.

Description

technical field [0001] The invention relates to the field of sampling and analysis of trimethylgallium, in particular to a trimethylgallium online analysis device and an analysis method thereof. Background technique [0002] Trimethylgallium is used in metal-organic chemical vapor deposition (MOCVD); trimethylgallium is a colorless, transparent and toxic liquid at normal temperature and pressure. It is easy to oxidize in the air, spontaneously ignites at room temperature, emits white smoke of metal oxides when burning, and decomposes at high temperature. Since the synthesis process of trimethylgallium spontaneously ignites when it encounters air, the sampling and analysis process needs to be carried out in an anhydrous and oxygen-free environment. The prior art patent CN102607885B discloses a gas hydrate sampling and analysis method and device, which directly samples the sample of the hydrate system without separation operation, and the position of the sampler in the kettle...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N30/06G01N30/20
CPCG01N30/06G01N30/20
Inventor 李强强俞冬雷郑锐
Owner 安徽亚格盛电子新材料有限公司
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