High-precision flexible piezoelectric film material local polarization method

Abstract

The invention discloses a high-precision flexible piezoelectric film material local polarization method, which comprises the steps of firstly, adopting a local polarization process, and pressing and touching a film by taking a flat-head circular pressure head as an upper and lower electrode polarization pressure head; dividing the film into a surface A and a surface B which are respectively in contact with a positive electrode and a negative electrode, taking 500V as an initial voltage and then taking 500V as gradient boosting, and loading on each gradient voltage until the voltage is boosted to 5000V; and then preparing a pressure head with a circular structure, and eliminating an edge outer halo polarization area, specifically, respectively contacting the A and B surfaces of the film with the positive electrode and the negative electrode, loading by taking 500V voltage as initial voltage until the voltage is increased to 2000V, and simultaneously detecting a piezoelectric D33 value of the edge outer halo area until the D33 value of the edge area is reduced to 0. According to the PVDF film obtained through polarization by adopting the method, the polarization area can be accurately controlled. In addition, positive and negative voltage alternate polarization is adopted, the polarization piezoelectric coefficient is high, and the polarization stability is good.

Description

Technical field [0001] The present invention belongs to the technical field of semiconductor material, and more particularly to a partial polarization method of piezoelectric thin film material. Background technique [0002] In the sensor technology, the existing piezoelectric thin film is partially polarized, and the circular head can be directly polarized in the target area, and the polarization is shown. figure 1 Indicated. The use of DC polarization can cause polarized regions Huano: that is, the target polarization area is better than the piezoelectric performance (piezoelectric coefficient D). 33 ), But the outside of the target polarization area is also polarized, which can result in starting from the edge. 33 The value is slow to fall into 0, such as figure 2 As shown, the polarized halo region is too large, and the piezoelectric performance test effect of the film is severe. [0003] This polarization of this polarity can be reduced to a certain extent, but the polarizat...

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Problems solved by technology

And because the AC polarization is relative to the positive and negative voltages, the positive voltage loading time is short, resulting in low piezoelectric performance in the final target polarization area

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