Design method of broadband capacitive micromachined ultrasonic transducer with hybrid diaphragm structure

A technology of capacitive micromachines and ultrasonic transducers, which is applied in the direction of vibrating fluids, etc., can solve the problems of insufficient directivity, insufficient bandwidth, and low sound pressure of CMUT emission and low receiving sensitivity, so as to achieve convenient and reliable application and improve Bandwidth, the effect of increasing the emission sound pressure

Active Publication Date: 2022-05-24
ZHONGBEI UNIV
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  • Abstract
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  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] In order to solve the technical problems of current CMUTs such as low emission sound pressure and low reception sensitivity, insufficient directivity, and insufficient bandwidth, the present invention provides a design method for a broadband capacitive micromechanical ultrasonic transducer with a hybrid diaphragm structure

Method used

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  • Design method of broadband capacitive micromachined ultrasonic transducer with hybrid diaphragm structure
  • Design method of broadband capacitive micromachined ultrasonic transducer with hybrid diaphragm structure
  • Design method of broadband capacitive micromachined ultrasonic transducer with hybrid diaphragm structure

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0046] Example 1 Finite element simulation analysis of broadband CMUT

[0047] In this example, a CMUT structure composed of three kinds of micro-elements with vibrating membrane sizes of 59 μm-2.6 μm, 60 μm-2.6 μm and 61 μm-2.6 μm is established. The resonant frequencies of the three micro-elements in air are 3.13 MHz, 3.02MHz and 2.93MHz, the structural parameters are shown in Table 1, the number of micro-elements is 9, and the spacing is 5 μm. The bandwidth of the CMUT in the air domain is obtained through COMSOL finite element simulation analysis and MATLAB calculation. The specific analysis process is as follows:

[0048]

Embodiment 2

[0051] Example 2 Bandwidth Performance Analysis of Broadband CMUT

[0052] In this embodiment, the distance between the micro-elements constituting the CMUT and the number of micro-elements of different sizes are respectively changed, and the influence of the distance and the number on the bandwidth of the CMUT is analyzed, so as to further optimize the bandwidth characteristics of the CMUT.

[0053] Firstly, the influence of cell spacing on the bandwidth characteristics of CMUT is analyzed. Select the CMUT model composed of three different micro-element sizes used in the previous example, set the spacing between the micro-elements to 60 μm and 120 μm, respectively, perform finite element modeling analysis and MATLAB calculation in COMSOL, and finally obtain different The bandwidth of the CMUT at the micro-element spacing, the results are as follows Figure 5 and Image 6 shown.

[0054] Will Figure 4 , Figure 5 and Image 6 The comparative analysis shows that the chan...

Embodiment 3

[0059] Embodiment 3 Broadband CMUT Design Method

[0060] It can be seen from the analysis of the above embodiments that the CMUT with the micro-element hybrid structure can achieve the purpose of increasing the bandwidth. The number of micro-elements of different sizes and the size of each micro-element are the main structural parameters of CMUT, which directly affect the resonant frequency and bandwidth of CMUT. Therefore, in the CMUT design process, the appropriate number and size of micro-elements should be selected. Among them, the micro-element size can be described by the thickness and radius of the vibrating membrane. On the one hand, the thickness and radius of the vibrating membrane determine the resonant frequency of the micro-element; on the other hand, when the thickness and radius of the membrane are determined, the radii of structures such as electrodes and cavities are determined accordingly. This embodiment mainly introduces the selection principle of the nu...

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Abstract

The invention relates to ultrasonic transducers in the fields of ultrasonic imaging, medical diagnosis, nondestructive testing, liquid flow measurement, fault location, biochemical gas detection, etc., and specifically relates to a design method for a broadband capacitive micromechanical ultrasonic transducer with a hybrid diaphragm structure. A design method for a hybrid diaphragm structure broadband capacitive micromachined ultrasonic transducer, including integrating on a chip and arranging N x N Rectangular array of multiple CMUT cells, N is an odd number; each row of CMUT cells is composed of N CMUT cells with different emission sound pressure frequencies are composed of CMUT cells in different rows. N Each row of CMUT microcells is arranged in a way that the emission sound pressure frequency increases or decreases sequentially, and the order of increase and decrease of two adjacent rows is opposite; in each row of CMUT microcells, the emission sound pressure of adjacent microcells There is frequency overlap; the central cell in each row of CMUT cells resonates at the same frequency as the entire capacitive micromachined ultrasound transducer.

Description

technical field [0001] The invention relates to ultrasonic transducers in the fields of ultrasonic imaging, medical diagnosis, non-destructive testing, liquid flow measurement, fault location, biochemical gas detection, etc., in particular to a design method for a hybrid diaphragm structure broadband capacitive micromachined ultrasonic transducer. Background technique [0002] Ultrasound has the characteristics of high frequency, concentrated energy, strong penetration and good directionality, and is widely used in ultrasonic imaging, medical diagnosis, non-destructive testing, liquid flow measurement, fault location, biochemical gas detection and other fields. Among them, in the application of ultrasonic imaging, the ultrasonic transducer directly determines the imaging resolution and detection depth of the imaging system. The higher the resonant frequency of the transducer, the higher the imaging resolution, and the easier it is to obtain high-quality images. However, as t...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B06B1/02
CPCB06B1/02
Inventor 王红亮黄霄蔚丽俊何常德张文栋丁琦
Owner ZHONGBEI UNIV
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