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Fixing ring detection device

A detection device and fixing ring technology, applied in measuring devices, instruments, sorting and other directions, can solve the problems of low detection efficiency, inability to detect the shape of the fixing ring, etc., to achieve high detection efficiency, avoid re-use, and facilitate access Effect

Pending Publication Date: 2021-11-09
JINGLONG TECH SUZHOU
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The fixed ring detection device in the prior art can usually only detect whether the fixed ring is too thick, and cannot detect other shape conditions of the fixed ring; moreover, in the existing detection process of the fixed ring, all are manually operated by the staff, and the detection efficiency is low

Method used

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Embodiment Construction

[0027] The specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings, but it should be understood that the protection scope of the present invention is not limited by the specific embodiments.

[0028] Unless expressly stated otherwise, throughout the specification and claims, the term "comprise" or variations thereof such as "includes" or "includes" and the like will be understood to include the stated elements or constituents, and not Other elements or other components are not excluded.

[0029] like figure 1 , figure 2 and image 3 As shown, the fixed ring detection device in an embodiment of the present invention includes: a machine base 1 , a detection mechanism 2 and a controller 3 .

[0030] Wherein, the frame 1 has a detection channel 11 through which the fixed ring can pass. The detection mechanism 2 is arranged on the machine base 1 , and the detection mechanism 2 includes a sensor assembly 21 a...

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PUM

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Abstract

The invention discloses a fixing ring detection device which comprises a machine base, a detection mechanism and a controller, wherein the machine base is provided with a detection channel through which the fixing ring can pass; the detection mechanism is arranged on the machine base and comprises a sensor assembly arranged corresponding to the detection channel, and the sensor assembly is used for measuring appearance information of the fixing ring passing through the detection channel; the controller is connected with the sensor assembly and used for judging whether the fixing ring is a good product or not according to the appearance information. According to the fixing ring detection device, the thickness and the outer diameter of the fixing ring can be detected through the sensor assembly, the outer diameter, abnormal thickness (over-thick or over-thin) and abnormal warping of the fixing ring can be detected, and the detection efficiency is higher and more accurate.

Description

technical field [0001] The invention relates to the technical field of detection devices, in particular to a detection device for a fixed ring. Background technique [0002] In semiconductor wafer processing, a wafer fixing ring is used, and the shape information of the wafer fixing ring will affect the processing quality of the wafer. The fixed ring detection device in the prior art can usually only detect whether the fixed ring is too thick, but cannot detect other shape conditions of the fixed ring; moreover, in the existing detection process of the fixed ring, all the detection processes are manually operated by the staff, and the detection efficiency is low. [0003] Therefore, it is necessary to provide a new fixed ring detection device for the problems in the prior art. Contents of the invention [0004] The purpose of the present invention is to provide a fixed ring detection device, which can automatically detect the shape information of the fixed ring, and can a...

Claims

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Application Information

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IPC IPC(8): G01B21/08G01B21/10G01B21/32B07C5/12B07C5/36
CPCG01B21/08G01B21/10G01B21/32B07C5/12B07C5/36
Inventor 杨德松
Owner JINGLONG TECH SUZHOU
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