Single crystal furnace positioning mechanism capable of automatically stabilizing seed crystals, single crystal furnace system and stabilizing method

Abstract

The invention provides a single crystal furnace positioning mechanism capable of automatically stabilizing seed crystals. The positioning mechanism is arranged at the top end of a single crystal furnace auxiliary chamber and comprises a connecting device and a positioning device, one end of the connecting device is connected with the single crystal furnace auxiliary chamber, and the other end of the connecting device is connected with the positioning device; and the two ends of the positioning device are communicated with the outside, and the positioning device and the auxiliary chamber are coaxially arranged, so that the seed crystal is conveniently positioned and stabilized. The positioning mechanism has the beneficial effects that when the positioning mechanism is applied to the single crystal Czochralski process, the seed crystals can be stabilized in the single crystal Czochralski process, so that the seed crystal stabilizing process is automatically carried out, the automatic stabilization of the seed crystals is realized, the labor intensity is reduced, and the production efficiency is improved.

Description

technical field [0001] The invention belongs to the technical field of Czochralski single crystal, and in particular relates to a single crystal furnace positioning mechanism for automatically stabilizing a seed crystal, a single crystal furnace system and a process. Background technique [0002] At present, the competition in the industry is becoming increasingly fierce, and the degree of automation of single crystal production enterprises is gradually increasing, from the era of Industry 2.0 to the era of Industry 3.0 and 4.0. During the single crystal pulling process, the equal diameter process has been automatically controlled, and before the single crystal is pulled, the seed crystal needs to be maintained in a stable state to ensure that the seed crystal growth process will not shake and avoid stress. [0003] At present, the positioning of the seed crystal is all done manually. This process requires the seed crystal to be lowered to the visible position of the auxilia...

AI Technical Summary

Problems solved by technology

This process often takes seven to ten minutes, which is a serious waste of time, which is an important reason affecting the automation process of the single crystal furnace, and the stability and accuracy of the seed crystal is difficult to guarantee due to the relationship between skills and time in some operations, which will lead to single crystal pulling in the subsequent process. Occurrence of abnormal accidents such as crystal shaking

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