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High-temperature and high-vacuum annealing furnace

A high vacuum and annealing furnace technology, applied in vacuum evaporation coating, furnace, furnace type and other directions, can solve the problems of low vacuum degree of vacuum annealing furnace, low temperature of vacuum annealing furnace, clean process environment, etc., to improve the use of heat efficiency, preventing heat loss, and good heating uniformity

Active Publication Date: 2021-10-12
SHENYANG SCI INSTR RES CENT CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] 1. The vacuum degree of the existing vacuum annealing furnace is low and cannot provide a very clean process environment
[0004] 2. The temperature of the existing vacuum annealing furnace is not high, it is difficult to achieve high temperature and long-term heat preservation
[0005] 3. The temperature uniformity of sample annealing is not good

Method used

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Embodiment Construction

[0028] The present invention will be described in further detail below in conjunction with the accompanying drawings.

[0029] Such as Figure 1~4 As shown, the present invention includes a sampling chamber assembly 1, an annealing chamber assembly 2 and a vacuum pumping assembly, wherein the vacuum pumping assembly includes an ion pump 3, a molecular pump 7 and a mechanical pump 8, and the sampling chamber assembly 1 includes a sampling chamber cavity 25 , sample library 27 and manual transfer rod manipulator 29, annealing chamber assembly 2 includes annealing chamber cavity 15, upper heater 16 and lower heater 21, ion pump 3, annealing chamber cavity 15, sampling chamber cavity 25 and molecule The pumps 7 are connected in sequence, and the molecular pump 7 is connected to the mechanical pump 8 through pipelines, between the ion pump 3 and the annealing chamber cavity 15, between the annealing chamber cavity 15 and the sampling chamber cavity 25, and between the sampling cham...

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Abstract

The invention relates to vacuum coating experimental equipment, in particular to a high-temperature and high-vacuum annealing furnace. The furnace is characterized in that an ion pump, an annealing chamber cavity, a sample introduction chamber cavity and a molecular pump are sequentially connected, and the molecular pump is connected with a mechanical pump through a pipeline; gate valves are arranged between the ion pump and the annealing chamber cavity, between the annealing chamber cavity and the sample introduction chamber cavity and between the sample introduction chamber cavity and the molecular pump; and a fixed upper heater and a lower heater capable of lifting up and down are arranged in the annealing chamber cavity, a multi-layer sample library capable of lifting up and down is arranged in the sample introduction chamber cavity, and a manual transfer rod manipulator is mounted at one side of the sample introduction chamber cavity. Sample exchange with an annealing chamber can be rapidly completed through the high-temperature and high-vacuum annealing furnace under the vacuum condition, and it is guaranteed that the annealing chamber is in a high-vacuum state all the time. According to the high-temperature and high-vacuum annealing furnace, the cold-state limit vacuum degree of the annealing chamber can reach 10<-8> Pa ultrahigh vacuum, the hot-state vacuum degree can reach 10<-6> Pa when the annealing chamber is heated to 1600 DEG C, and long-time heat preservation annealing of a sample at the temperature not higher than 1600 DEG C can be achieved.

Description

technical field [0001] The invention relates to vacuum coating experimental equipment, in particular to a high-temperature and high-vacuum annealing furnace. Background technique [0002] Annealing is a common process for heat treatment of vacuum coating experimental equipment. The technical problems existing in the current vacuum annealing furnace are: [0003] 1. The vacuum degree of the existing vacuum annealing furnace is low, which cannot provide a very clean process environment. [0004] 2. The temperature of the existing vacuum annealing furnace is not high, and it is difficult to achieve high temperature and long-term heat preservation. [0005] 3. The temperature uniformity of the sample annealing is not good. Contents of the invention [0006] In view of the above-mentioned problems existing in the existing vacuum annealing furnace, the object of the present invention is to provide a high temperature and high vacuum annealing furnace. The cold state limit vac...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/56C23C16/54C23C14/58C23C16/56C21D9/00C21D1/26C21D1/773
CPCC23C14/56C23C16/54C23C14/5806C23C16/56C21D9/00C21D1/26C21D1/773Y02P10/20
Inventor 白印马锦李昌龙
Owner SHENYANG SCI INSTR RES CENT CHINESE ACAD OF SCI
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