Confocal microscopic infrared modulation photoluminescence spectrum experimental device and testing method

A confocal microscopy and photoluminescence spectroscopy technology is applied in the field of confocal microscopy infrared modulation photoluminescence spectroscopy experimental devices to achieve the effects of stable and controllable power, high resolution, and signal-to-noise ratio and high signal-to-noise ratio.

Pending Publication Date: 2021-10-08
SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI
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Problems solved by technology

However, limited by factors such as the size of the excitation spot, the spatial resolution is only on the order of 10 microns, and it is still difficult to microscopically resolve the electronic transitions of infrared materials on the micron scale.

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  • Confocal microscopic infrared modulation photoluminescence spectrum experimental device and testing method

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Embodiment Construction

[0023] Concrete implementation is as shown in the accompanying drawings. The present invention will be described in detail below according to the accompanying drawings, which can better illustrate the technical features and functional characteristics of the present invention.

[0024] The main components of the confocal micro-infrared modulation PL spectrum experimental testing system of the present invention are as follows:

[0025]The pump laser and its direction stabilization and collimation module, which consists of a laser 101 whose output photon energy is greater than the forbidden band width of the sample to be measured, a laser power controller 102 that stabilizes and regulates the output laser power for a long time, and spatially It consists of a spatial filter 103 for filtering / optimizing the quality of the spot, a collimating optical path 104 and a beam expander 105 for collimating the laser transmission and expanding the beam respectively.

[0026] The reflective ...

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Abstract

The invention discloses a confocal microscopic infrared modulation photoluminescence spectrum experimental device and a testing method. The device comprises a pump laser and direction stable control and collimation module, a reflection objective lens laser focusing and infrared signal collection module, a low/variable temperature objective table, a sub-micron resolution six-dimensional electric control displacement table, a quasi real-time image monitoring module, a step scanning Michelson interferometer, an amplitude modulation and phase sensitive detection module and a computer control system. Based on the device, the invention further provides a method for testing the confocal microscopic infrared modulation photoluminescence spectrum covering the broadband of 3-20 microns. The invention relates to a spectroscopy imaging test device and method for detecting optical properties and electronic energy band structures of a narrow band gap material microcell, and has the advantages of non-destructive non-contact, long wavelength, wide band, high spatial resolution, high spectral resolution and the like. The device is very suitable for optical property detection and photoelectron microscopic analysis of microstructures including infrared electronic materials such as narrow bandgap semiconductors.

Description

Technical field: [0001] The invention relates to a confocal micro-infrared modulation photoluminescence spectrum experimental device and a testing method. The confocal micro-infrared modulation photoluminescence spectroscopy experimental system and method involved are mainly based on the visible-far infrared confocal optical path, integrating step-scan Michelson interferometer with phase-sensitive detection, laser spot and photoluminescence spot shaping, Multi-dimensional spectral microscopic imaging and other technologies, experimental devices and test methods for confocal microscopic infrared modulation photoluminescence spectra covering a wide band of 3-20 microns, with non-destructive non-contact, long wavelength, wide band, high spatial resolution and high Spectral resolution and other advantages are suitable for the detection of optical properties of microstructures including infrared optoelectronic materials such as narrow-bandgap semiconductors and photoelectron microa...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/64G01B11/24G01B9/02
CPCG01N21/64G01N21/6402G01N21/6458G01N21/6489G01B11/2441G01B9/02042G01B9/02028G01N2021/6417
Inventor 邵军陈熙仁
Owner SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI
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