Ion source experiment platform
An experimental platform and ion source technology, applied in the performance research field of ion source performance research and ion source structure optimization, can solve the problems of difficult control of the positional relationship between the ion source and the magnetic pole surface, inaccurate research conclusions, and poor repeatability of experimental results. Achieve the effect of increasing the diversity of data collection, high experimental repeatability, and reducing the phenomenon of sparking
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[0041] In this embodiment, when the hydraulic machine is turned on, the hydraulic cylinder will lift the upper magnetic pole 23, the upper cover plate, the upper magnetic yoke, the upper magnetic pole 23 and the coil 7, perform the uncapping process of the ion source platform, and then install the required External equipment for conducting ion source experiments and measuring experimental data, such as ion source 3, extraction electrodes, etc. When the experimental equipment is installed inside the vacuum box 20 and the equipment is positioned inside the vacuum chamber, the hydraulic cylinder is lowered, the contact between the bottom surface of the upper magnetic pole 23 and the vacuum box 20 is closed, the mechanical pump and the molecular pump are turned on, and the vacuum chamber is extracted. The internal air raises a high-vacuum vacuum condition for experiments to be carried out. When the vacuum reaches the experimental requirements, hydrogen gas is introduced into the a...
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