Chip mounter anti-chip-floating detection device and method

Abstract

The invention provides a chip mounter anti-chip-floating detection device and method. The device comprises a ceramic disc, a chip mounter and an image acquisition unit. The upper surface of the ceramic disc forms a placement area for placing silicon chips, and the chip mounter is arranged above the ceramic disc and is used for placing the silicon chips on the ceramic disc; the image acquisition unit comprises a camera and an image processing system, the camera is arranged above the ceramic plate, and the camera is connected with the image processing system. The device and method have the advantages that the chip fluttering prevention detection function of the chip mounter is added, and the chip mounter chip fluttering prevention detection device and method are easy to manufacture, low in failure rate, safe, reliable and convenient to operate; according to the actual use effect of a workshop site, the system can effectively avoid silicon wafer fragmentation and damage to parts such as a polishing pad, a ceramic disc, a center guide wheel, a side guide wheel and a polishing machine large disc caused by chip fluttering of the chip mounter, avoids huge economic loss and reduces maintenance man hours.

Description

technical field [0001] The invention belongs to the technical field of silicon wafer processing, and in particular relates to an anti-floating wafer detection device and method of a placement machine. Background technique [0002] At present, when polishing silicon wafers, it is necessary to paste multiple silicon wafers on the ceramic plate according to certain rules. If there is a position deviation in the position of the paste, or even two silicon wafers are overlapped or overlapped, they will be stuck together. During the polishing process, silicon wafers are broken, and polishing pads, ceramic discs, center guide wheels, side guide wheels, polishing machine plates and other components are damaged, resulting in huge economic losses. Contents of the invention [0003] In view of this, the present invention aims to propose a chip mounter anti-floating chip detection device and method, in order to prevent the silicon chip from being biased or stacked during the chip mount...

AI Technical Summary

Problems solved by technology

[0002] At present, when polishing silicon wafers, it is necessary to paste multiple silicon wafers on the ceramic plate according to certain rules. If there is a position deviation in the position of the paste, or even two silicon wafers are overlapped or overlapped, they will be stuck together. During the polishing process, silicon wafers are broken, and polishing pads, ceramic discs, center guide wheels, side guide wheels, polishing machine plates and other components are damaged, resulting in huge economic losses

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