Angle detection device for cutting surface of silicon single crystal rod

Abstract

The invention discloses an angle detection device for a cutting surface of a silicon single crystal rod. The angle detection device comprises a rack, wherein a linear guide is fixedly installed at one side of the top of the rack; a lead screw is fixedly installed in the linear guide; the lead screw is sleeved with a sliding block; a movable clamp is fixedly installed at the top of the sliding block; a fixed clamp is fixedly installed at the side, away from the movable clamp, of the top of the rack; an angle measuring instrument is fixedly installed at the side, close to the fixed clamp, of the top of the rack; a motor is fixedly installed at one side in the rack; a rotating shaft is fixedly installed at the side, close to the top of the motor, in the rack; an output shaft of the motor is sleeved with a driving gear; the rotating shaft is sleeved with a transmission gear; and the side, away from the sliding block, of the lead screw is sleeved with a driven gear. The angle detection device for the cutting surface of the silicon single crystal rod is simple and reasonable in structure and convenient to operate, effectively solves the problem that most existing angle measurement devices are lack of automatic clamping devices and automatic correction devices, and has wide popularization and application values.

Description

technical field [0001] The invention relates to the technical field of angle detection, in particular to a device for detecting the angle of a cut surface of a single crystal silicon rod. Background technique [0002] Single crystal silicon rods are silicon single crystal rods formed by shaping or pulling in a furnace through zone melting or Czochralski technology. This kind of single crystal silicon rod needs to be cut. During the cutting process, a certain angle will inevitably be formed on the cutting surface. When the angle exceeds the allowable range, the cutting machine needs to be adjusted. Crystal silicon rods are needed in this process. Cutting surface angle detection device. However, most of the existing single crystal silicon rod cutting surface angle detection devices have the following shortcomings: 1. Can not be automatically clamped, manual clamping is required, which greatly increases labor intensity and affects production efficiency; 2. The detection device...

AI Technical Summary

Problems solved by technology

However, most of the existing single crystal silicon rod cutting surface angle detection devices have the following shortcomings: 1. Can not be automatically clamped, manual clamping is required, which greatly increases labor intensity and affects production efficiency; 2. The detection device lacks The automatic calibration device needs to be manually checked and corrected after being used for a period of time; therefore, we have improved this and proposed a single crystal silicon rod cutting surface angle detection device

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