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Light source normalization processing method for a spectral confocal measurement system

A measurement system and spectral confocal technology, which is applied in the field of light source normalization processing of the spectral confocal measurement system, can solve problems such as uneven light intensity distribution, and achieve the effect of correcting system errors

Active Publication Date: 2022-04-26
合肥多彩谱色科技有限公司
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Problems solved by technology

[0006] In order to solve the shortcomings of the above-mentioned prior art, the present invention proposes a light source normalization processing method of the spectral confocal measurement system, in order to solve the problem of uneven light intensity distribution at different wavelength positions under the existing light source conditions. problem, correct the error caused by the uniformity of the light source, and the measurement error of other optical devices in the system, so as to improve the measurement accuracy and stability of the system

Method used

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  • Light source normalization processing method for a spectral confocal measurement system
  • Light source normalization processing method for a spectral confocal measurement system
  • Light source normalization processing method for a spectral confocal measurement system

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Embodiment Construction

[0035] In this example, if figure 1 with figure 2 As shown, a spectral confocal measurement system includes: a light source assembly 10, a spectral signal dispersion assembly, a spectral signal receiving assembly 30, a controller assembly 40, and a measured object 50;

[0036] The light source assembly 10 includes: a white light LED light source, an LED collimator lens and a fiber optic collimator;

[0037] The spectral signal dispersion component includes: a Y-shaped fiber coupler 60 and a dispersion lens 20;

[0038] The first connection port 601 and the second connection port 602 of the Y-type fiber coupler 60 are respectively connected to the light source assembly 10 and the spectral signal receiving assembly 30 , and the third connection port 603 of the Y-type fiber coupler 60 is connected to the dispersion lens 20 .

[0039] In this example, if image 3 As shown, a light source normalization processing method of a spectral confocal measurement system includes the fol...

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Abstract

The invention discloses a light source normalization processing method of a spectral confocal measurement system, which is to calculate the spectral intensity distribution of the light source by collecting the signal of the spectral confocal light source, and convert it into a normalization coefficient. The present invention can normalize the collected measured target signals in the normal measurement process to solve the problem of poor spectral uniformity of the light source, correct the error caused by the uniformity of the light source, and measure other optical devices in the system Error, so that the measurement accuracy and stability of the spectral confocal displacement sensor can be improved.

Description

technical field [0001] The invention relates to the field of non-contact measurement, in particular to a light source normalization processing method of a spectral confocal measurement system. Background technique [0002] The spectral confocal displacement sensor is a new type of non-contact photoelectric displacement sensor with ultra-high precision and ultra-high stability. This technology is recognized globally as an accurate and reliable non-contact distance and thickness measurement technology, and is one of the few non-contact three-dimensional measurement technologies recommended by the ISO25178 international standard. [0003] Spectral confocal technology uses the principle of confocal microscopy to establish the correspondence between the focal distance and the wavelength through the dispersion frequency selective optical system, and then uses the spectrometer to decode the corresponding wavelength information to obtain the corresponding displacement information, a...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/02G01B11/00
CPCG01B11/02G01B11/00G01B21/042
Inventor 孙拉拉应玉龙王凯
Owner 合肥多彩谱色科技有限公司
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