Method and system for optimizing comprehensive bandwidth of far infrared blocking impurity band detector

A technology for blocking impurities and detectors. It is used in design optimization/simulation, semiconductor devices, complex mathematical operations, etc. It can solve the problems of high time and economic cost, and achieve the effect of short research and development cycle, avoiding repeated test pieces, and low research and development cost.

Active Publication Date: 2021-07-09
上海微波技术研究所(中国电子科技集团公司第五十研究所)
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Problems solved by technology

In order to balance the detector response bandwidth and transmission bandwidth, so that the BIB detector has the optimal comprehensive bandwidth, the existing method is to select a series of BIB detectors with different thicknesses of the absorbing layer for direct tape-out, and then choose the best according to the tape-out results. High time and economic cost

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  • Method and system for optimizing comprehensive bandwidth of far infrared blocking impurity band detector
  • Method and system for optimizing comprehensive bandwidth of far infrared blocking impurity band detector
  • Method and system for optimizing comprehensive bandwidth of far infrared blocking impurity band detector

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[0052] The present invention will be described in detail below in conjunction with specific embodiments. The following examples will help those skilled in the art to further understand the present invention, but do not limit the present invention in any form. It should be noted that those skilled in the art can make several changes and improvements without departing from the concept of the present invention. These all belong to the protection scope of the present invention.

[0053] According to the method for optimizing the integrated bandwidth of a far-infrared blocking impurity band (BIB) detector provided by the present invention, the method obtains the curve of the figure of merit of the integrated bandwidth of the detector changing with the thickness of the absorbing layer through numerical simulation and data fitting. According to the curve, the thickness of the absorbing layer corresponding to the optimal integrated bandwidth is extracted, and then the BIB detector is...

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Abstract

The invention provides a method and a system for optimizing the comprehensive bandwidth of a far infrared blocking impurity band detector. The method comprises the following steps: obtaining a curve of a comprehensive bandwidth merit figure factor of the blocking impurity band detector along with the change of the thickness of an absorption layer through numerical simulation and data fitting; and extracting the thickness of the absorption layer corresponding to the optimal comprehensive bandwidth according to the curve, wherein the thickness of the absorption layer is used for manufacturing an impurity blocking band detector. According to the invention, the thickness of the absorption layer corresponding to the optimal comprehensive bandwidth can be extracted for the blocking impurity band detector obtained by different material systems and different process conditions, so that the blocking impurity band detector designed and manufactured by the method can obtain the optimal comprehensive bandwidth by balancing the response bandwidth and the transmission bandwidth; therefore, repeated piece testing in order to optimize the comprehensive bandwidth of the device is avoided, the research and development period is greatly shortened, and the research and development cost is reduced.

Description

technical field [0001] The present invention relates to semiconductor light detector technology, in particular to a method and system for optimizing the comprehensive bandwidth of a far-infrared blocking impurity band detector. Background technique [0002] Far-infrared radiation usually refers to electromagnetic waves with a wavelength between 14 μm and 1000 μm, which has the characteristics of clothing penetration, fingerprint resolution and non-destructive detection. Therefore, far-infrared technology can be widely used in astronomical observation, atmospheric monitoring and contraband detection. In the field of astronomical observation, most asteroids and cosmic dust have many characteristic absorption peaks in the far-infrared band, and gaseous nebulae can radiate far-infrared rays through molecular rotation and vibration, so high-performance deep-space exploration can be realized through far-infrared detectors . In the field of atmospheric monitoring, compared with t...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G06F30/23G06F17/11G06F17/18H01L31/0216G06F111/10
CPCG06F30/23G06F17/11G06F17/18H01L31/02161G06F2111/10
Inventor 王晓东陈雨璐马维一崔汇源王兵兵张传胜刘文辉童武林胡永山
Owner 上海微波技术研究所(中国电子科技集团公司第五十研究所)
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