Intelligent online adjustable strip-shaped evaporation source

Abstract

The invention discloses an intelligent online adjustable strip-shaped evaporation source which mainly comprises a crucible, an intelligent material control system, a sliding type electrode system and an intelligent shielding system. The intelligent material control system is arranged in a material containing cavity of the crucible and can adjust the distribution position and state of the evaporation material in the material containing cavity on line. The sliding type electrode system is arranged on the outer surface of the bottom of the crucible and mainly comprises two or more sliding type electrode blocks which are connected with the positive electrode and the negative electrode of an evaporation source power source respectively, and the heating area of the crucible material containing cavity is adjusted online by controlling the sliding of the sliding type electrode blocks. The intelligent shielding system is positioned between the crucible and an evaporation coating substrate, can perform evaporation shielding on different areas above the crucible, and mainly comprises a shielding strip. The intelligent material control system, the sliding type electrode system and the intelligent shielding system are matched with one another, and the evaporation coating area below the evaporation coating substrate can be continuously regulated and controlled on line.

Description

technical field [0001] The invention belongs to the technical field of new energy power batteries, and in particular relates to an intelligent online adjustable strip-shaped evaporation source used in the preparation of new energy power batteries. Background technique [0002] Roll-to-roll coating has the characteristics of fast production speed, high efficiency, and is suitable for large-area preparation. It is widely used in the fields of packaging, electronics, construction, laser anti-counterfeiting and other functional films. In recent years, with the rapid development of new energy power battery technology, the demand for roll-to-roll flexible coating products has gained new growth, and higher requirements have been put forward for roll-to-roll coating technology and equipment. [0003] Vacuum evaporation coating is one of the main coating methods used in the preparation of coil coating products, and the process technology is relatively mature. However, the evaporatio...

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Problems solved by technology

However, the evaporation area of ​​the evaporation source used in the existing evaporation coating technology is relatively fixed. When the operator needs to adjust the evaporation area according to the process requirements, it is necessary to open the equipment to adjust the shielding plate or evaporation source off-line when the equipment stops working. , unable to conduct flexible regulation in a timely manner, it is difficult to meet the flexible and changeable process requirements of new energy power battery thin film products

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