Waste photoresist stripping liquid recycling system

Abstract

The invention relates to the technical field of waste liquid recycling treatment, in particular to a waste photoresist stripping liquid recycling system which comprises a pretreatment unit, an evaporation unit and a modulating and recycling unit. The pretreatment unit is used for removing photoresist and metal ions in waste liquid and comprises a nanofiltration membrane filtering device and an electrodialysis device which are communicated in sequence. Waste liquid sequentially passes through the nanofiltration membrane filtering device and the electrodialysis device and enters the evaporation unit; the evaporation unit is used for removing moisture in the waste liquid and comprises a rectifying tower, a dehydrating tower and a rectifying collecting tank which are communicated in sequence, and the rectifying tower is communicated with the electrodialysis device. The modulating and recycling unit comprises a recycling tank and a stock solution tank, and the recycling tank and the stock solution tank are both communicated with the rectification collecting tank. According to the present invention, the waste stripping liquid can be treated, the pollution to the environment is reduced, meanwhile, recycling and cyclic utilization are achieved, and the production cost of an enterprise is controlled.

Description

technical field [0001] The invention relates to the technical field of waste liquid recovery and treatment, in particular to a photoresist stripping liquid waste liquid recycling system. Background technique [0002] The photoresist stripper is mainly used to remove the photoresist coated on the microcircuit protection area as a mask. It is a common chemical required for the photoresist chemical cleaning process of silicon-based material wafers. It is mainly composed of organic amines, polar Composed of organic solvents and or water. Photoresist and a small amount of metal ions are accumulated in the waste stripping solution during use. Since the waste stripping solution contains a large amount of organic molecules, if it is directly discharged, it will have a serious impact on the environment. [0003] In the prior art, the stripping liquid waste is mainly disposed of by qualified hazardous waste enterprises. This method will lead to the waste of recyclable and reused mate...

AI Technical Summary

Problems solved by technology

Photoresist and a small amount of metal ions are accumulated in the waste stripping solution during use. Since the waste stripping solution contains a large amount of organic molecules, if it is directly discharged, it will have a serious impact on the environment.

[0003] In the prior art, the stripping liquid waste is mainly processed by qualified hazardous waste enterprises. This method will lead to the waste of recyclable and reusable substances, and the production cost of enterprises is relatively high.

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