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Flow valve, mass flow control device and flow valve opening degree control method

A technology of mass flow control and flow valve, which is applied in the direction of flow control, flow control using electrical devices, valve devices, etc., can solve the problems of not having flow valve opening control, improve control accuracy and reliability, and avoid economic losses , to avoid the effect of fluctuations

Active Publication Date: 2021-06-22
BEIJING SEVENSTAR FLOW CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] In the actual production process, for example, when it is necessary to precisely control the flow and velocity of the argon gas entering the furnace, according to the operating experience and the specific requirements of the production process, the on-site operators often hope that under the premise of a certain inlet pressure, The control of the flow rate and flow rate of the gas entering the furnace is realized by setting a certain flow valve opening, but the current gas mass flow controller does not have the function of flow valve opening control

Method used

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  • Flow valve, mass flow control device and flow valve opening degree control method
  • Flow valve, mass flow control device and flow valve opening degree control method
  • Flow valve, mass flow control device and flow valve opening degree control method

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Embodiment Construction

[0034] The present application will be described in detail below, and examples of the embodiments of the present application are illustrated in the drawings in which the same or similar components are denoted by the same or similar components or components having the same or similar functions. Moreover, if the detailed description of the known techniques is unnecessary to the features of the present application, they will be omitted. The following is exemplary, and is intended to explain the present application by referring to the embodiments described with reference to the accompanying drawings.

[0035] Those skilled in the art can understand unless otherwise defined, all terms (including technical terms and scientific terms) used herein have the same meaning as generally understood by those of ordinary skill in the art. It should also be understood that those terms defined in a general dictionary should be understood to have meaningful meaning with the meaning of the context of...

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Abstract

The invention provides a flow valve, a mass flow control device and a flow valve opening degree control method. The flow valve comprises a valve body, a moving assembly arranged in the valve body and a displacement sensor connected with the moving assembly; the moving assembly is used for moving according to a received moving signal so as to adjust the flow of the flow valve; and the displacement sensor is used for determining an actual opening signal of the flow valve according to the movement amount of the moving assembly and sending the actual opening signal to a flow valve opening controller. By applying the flow valve, the mass flow control device and the flow valve opening degree control method, the opening degree of the flow valve on the MFC can be accurately controlled, and the reliability of the MFC is improved.

Description

Technical field [0001] The present invention relates to the semiconductor technology, and in particular, to a flow valve, a mass flow control device, and a flow valve opening degree control method. Background technique [0002] Mass Flow Controller (MFC) is often used to accurately measure and control fluid mass flow, which is widely used in semiconductor and integrated circuit technology, special material disciplines, chemical industry, petroleum industry, medicine, environmental protection and vacuum In various fields of research and production. [0003] During the actual production process, for example, when accurately controlling the argon flow and flow rate in the furnace, according to the specific requirements of operation experience and production, the on-site operators often hope that under the premise of the air intake, The control of the gas flow rate and flow of the furnace body is achieved by a given flow valve opening degree, but the current gas mass flow controller ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F16K17/20F16K31/04F16K37/00G05D7/06
CPCF16K17/20F16K31/04F16K37/0041G05D7/0617
Inventor 张征陈正堂赵迪
Owner BEIJING SEVENSTAR FLOW CO LTD
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