Lower electrode assembly for plasma processing equipment and plasma processing equipment
A technology for processing equipment and plasma, used in electrical components, circuits, discharge tubes, etc., to solve problems such as static charge accumulation, and reduce electrical damage or other risks.
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[0031] based on the following Figure 1 to Figure 6 , specifically explain the preferred embodiment of the present invention.
[0032] figure 1 It is a schematic structural diagram of a plasma processing device including a radio frequency electrode provided in an embodiment of the present invention.
[0033] Such as figure 1 As shown, the plasma processing equipment includes a vacuum reaction chamber 1. A base 2 is arranged in the vacuum reaction chamber 1. An electrostatic chuck 3 is arranged on the base 2. The electrostatic chuck 3 is used to carry a substrate W to be processed. The base 2 is provided with a cooling passage 4, and the two ends of the cooling passage 4 are respectively connected with two cooling pipes 11, and the cooling pipe 11 leads out of the vacuum reaction chamber 1, and is connected with a cooling liquid storage device (not shown in the figure). 4 The insulating liquid circulates inside, and the heat on the base 2 and the electrostatic chuck 3 is tak...
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Abstract
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