Lifting platform of probe card holder

Abstract

The invention belongs to the technical field of probe cards, and particularly relates to a lifting platform of a probe card holder. The lifting platform comprises a lifting platform slide rail, lifting platform slide blocks and a lifting platform plate, wherein the lifting platform is lifted by sliding the support slide blocks on the lifting platform support and connecting the support slide blocks with the lifting platform plate through a lifting platform pull rod, when the two support slide blocks slide oppositely, the upper end of the lifting platform pull rod slides inwards, the lower end of the lifting platform pull rod slides downwards to drive the lifting platform plate to move downwards, when the lifting platform plate moves to the bottom, the two support sliding blocks slide to the middle of the lifting platform support, the lifting platform pull rod tends to be vertical, under the condition that the support sliding blocks slide inwards at the constant speed, the lifting platform plate can descend in a decelerated mode, and after the lifting platform falls to the bottom, speed reduction and slow falling can be achieved.

Description

technical field [0001] The invention belongs to the technical field of probe cards, and in particular relates to a lifting platform of a probe card holder. Background technique [0002] With the development of the semiconductor industry, more and more electronic devices are connected to the semiconductor wafer. During the manufacturing process of the semiconductor device, the probe is contacted with the metal end on the semiconductor wafer to realize a temporary electrical connection. The electrical signal of the tester is transmitted to the semiconductor device through the probe, and the tester detects the electronic device on the semiconductor wafer through the returned electrical signal. [0003] The probe card is the link between the semiconductor wafer and the tester. By integrating multiple probes on the probe card, multiple probes can be simultaneously contacted with multiple semiconductor devices on the semiconductor wafer to improve detection efficiency. . [0004...

AI Technical Summary

Problems solved by technology

[0004] In the production process of semiconductor devices, it is necessary to visit a large number of circuit contacts in one or more devices multiple times, and move the probe card through the moving mechanism to make the probes contact with the contacts. At the same time, to match the detection process For multiple sets of contacts in the probe card, multiple probe cards need to be set, and the probe card is fixed by the holder. The holder is a polyhedron that can rotate. By setting one or more probe cards on each surface, the When switching the probe card, by rotating the holder, the corresponding probe card is rotated to the top of the semiconductor device for detection, or multiple movable platforms are set up to move the probe card to realize the connection between the probe card and different contact groups. Matching, in the prior art, in order to realize the detection of multiple sets of contacts, the exchange of probe cards is used to achieve matching, and the matching is achieved by switching different probe cards. The existing holder adopts polyhedron and mobile Due to the platform structure, multiple probe cards cannot be set, and the number of switchable probe cards is limited

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