Continuous winding vacuum coating method for ultrathin base film

Abstract

The invention discloses a continuous winding vacuum coating method for an ultrathin base film. The method is used for preparing multiple film layers on a flexible base film in the field of new energy power batteries, and mainly comprises the following steps: (1) placing the base film on an unwinding roller in an unwinding chamber of a vacuum coating machine, closing a vacuum chamber, and vacuumizing the vacuum chamber; (2) performing vacuum film penetration on the base film on a winding system by adopting a vacuum film penetration mechanism in a vacuum environment; and (3) when the vacuum degree in vacuum evaporation coating chambers and a magnetron sputtering coating chamber of the vacuum coating machine meets the process requirement, starting the winding system, an evaporation device and a magnetron target. The magnetron sputtering coating chamber is vertically arranged, and the vacuum evaporation coating chambers are arranged on the two sides of the magnetron sputtering coating chamber in a stacked mode. The base film passes through the vacuum evaporation coating chamber on one side, the magnetron sputtering coating chamber and the vacuum evaporation coating chamber on the other side in sequence, evaporation coating and magnetron sputtering coating are conducted respectively, and multiple film layers are plated on the two faces of the base film respectively.

Description

technical field [0001] The invention belongs to the advanced manufacturing technology field of new energy power batteries, in particular to a continuous winding vacuum coating method applied to ultra-thin base film manufacturing of new energy power batteries and a double-sided multi-station winding method used in the method. Vacuum coating machine. Background technique [0002] With the development of optical thin film technology and semiconductor technology, the application of vacuum coating technology in production is becoming more and more extensive and important, and vacuum evaporation coating is the earliest, most common and most widely used vacuum coating process. There are many types and types of vacuum evaporation coating machines. Among them, the intermittent vacuum evaporation coating machine has the longest history. However, due to its shortcomings such as inability to perform continuous coating, small coating area, and low production efficiency, it is difficult t...

AI Technical Summary

Problems solved by technology

When evaporative coating is performed on such ultra-thin flexible base films, the base film is easy to deform and wrinkle in the high coating heating environment temperature, and even cause the film base film to break due to excessive deformation, seriously affecting production efficiency and product quality

[0005] On the other hand, the coil coating generally requires a film penetration process before the start of the vacuum coating. In the existing coil coating equipment, most of the vacuum chambers need to be opened, and in the atmospheric environment, manually or by some mechanism in the coil system. Film penetration, this method will expose the base film and the inside of the vacuum coating machine to the atmosphere for a long time, especially when there are many winding coating modules and the film penetration path is complicated, it will have a negative impact on the quality of equipment and flexible coating products. more serious impact

Images