Laser steady-state evaporation coating system and method for high-melting-point material in fusion device
An evaporation coating, high melting point technology, used in vacuum evaporation coating, metal material coating process, sputtering coating and other directions
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[0031] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0032] According to an embodiment of the present invention, the present invention describes a laser steady-state evaporation system for high melting point materials (especially silicon and boron materials, melting points are 1414°C and 2180°C respectively) for the preparation of the first wall coating of a fusion device. In general, by adjusting the high energy density of the laser spot within a certain range, it is possible to melt high-melting poi...
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