Adjustable acceleration sensor based on modal localization effect

Abstract

The invention discloses an adjustable acceleration sensor based on a modal localization effect. The adjustable acceleration sensor is characterized in that two ends of a first clamped beam are respectively fixed through a first fixing end and a first mass block; the left end of the first mass block is connected with a first hinge end; the first hinge end is connected with a second fixing end; a second clamped beam is arranged on the left side of the first clamped beam; two ends of the second clamped beam are fixed through the second fixing end and the second mass block; the right end of the second mass block is connected with a second hinge end; the second hinge end is connected with the first fixing end; the first clamped beam and the second clamped beam are electrostatically coupled; a coupling power supply outputs coupling voltage to be loaded on the second clamped beam and is used for adjusting the electrostatic coupling strength between the first clamped beam and the second clamped beam; and the first clamped beam and the second clamped beam adjust driving force through a first fixed excitation electrode and a second fixed excitation electrode respectively. On-line adjustment of the sensitivity, the detection range and the resolution of the sensor can be realized; and the sensor has the advantages of high sensitivity, high robustness and the like.

Description

technical field [0001] The present invention relates to the technical field of micro-electro-mechanical systems, in particular, to an adjustable acceleration sensor based on mode localization effect. Background technique [0002] Accelerometers are commonly used in everything from automotive to aviation and aerospace. According to different sensitive mechanisms, acceleration sensors are generally divided into capacitive, piezoresistive and resonant. Among them, the resonant accelerometer is widely used due to the quasi-digital signal and high sensitivity, and its sensitive mechanism is based on the change of the axial force of the resonator caused by the inertial force of the mass to detect the frequency shift. [0003] To generate higher frequency sensitivity, resonator geometry optimization and the use of leverage mechanisms to amplify inertial forces are often used to increase sensitivity. Comi et al. proposed a novel resonant acceleration sensor design in "A Resonant M...

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Problems solved by technology

[0005] In order to solve the technical problems of the resonant accelerometer, which is difficult to improve the sensitivity of the frequency-shift output and has poor robustness to the external environment, the present invention provides an adjustable acceleration sensor based on the mode localization effect. The acceleration sensor mainly uses a resonator composed of two fixed beams of equal length. The coupling between the two fixed beams is electrostatically coupled, which can easily adjust the coupling strength and achieve the most suitable coupling strength in theory without any structural adjustment. Optimization, with the advantages of simple process, stable configuration and easy processing, so it can be widely used in various aspects

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