A Tunable Acceleration Sensor Based on Modal Localization Effect

Abstract

The invention discloses an adjustable acceleration sensor based on the mode localization effect, which comprises: the two ends of the first fixed beam are respectively fixed by the first fixed end and the first mass block; the left end of the first mass block is connected with the first hinged end connected; the first hinged end is connected to the second fixed end; the second fixed beam is placed on the left side of the first fixed beam, and its two ends are fixed by the second fixed end and the second mass block; the right end of the second mass block is connected to the second fixed end The two hinged ends are connected; the second hinged end is connected to the first fixed end; the first fixed beam and the second fixed beam are electrostatically coupled, and the output coupling voltage of the coupling power supply is loaded on the second fixed beam for adjustment The electrostatic coupling strength between the first fixed beam and the second fixed beam; the driving force of the first fixed beam and the second fixed beam is adjusted through the first fixed excitation electrode and the second fixed excitation electrode respectively. The invention can realize online adjustment of sensor sensitivity, detection range and resolution, and has the advantages of high sensitivity, strong robustness and the like.

Description

technical field [0001] The present invention relates to the technical field of micro-electro-mechanical systems, in particular, to an adjustable acceleration sensor based on mode localization effect. Background technique [0002] Accelerometers are commonly used in everything from automotive to aviation and aerospace. According to different sensitive mechanisms, acceleration sensors are generally divided into capacitive, piezoresistive and resonant. Among them, the resonant accelerometer is widely used due to the quasi-digital signal and high sensitivity, and its sensitive mechanism is based on the change of the axial force of the resonator caused by the inertial force of the mass to detect the frequency shift. [0003] To generate higher frequency sensitivity, resonator geometry optimization and the use of leverage mechanisms to amplify inertial forces are often used to increase sensitivity. Comi et al. proposed a novel resonant acceleration sensor design in "A Resonant M...

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Problems solved by technology

[0005] In order to solve the technical problems of the resonant accelerometer, which is difficult to improve the sensitivity of the frequency-shift output and has poor robustness to the external environment, the present invention provides an adjustable acceleration sensor based on the mode localization effect. The acceleration sensor mainly uses a resonator composed of two fixed beams of equal length. The coupling between the two fixed beams is electrostatically coupled, which can easily adjust the coupling strength and achieve the most suitable coupling strength in theory without any structural adjustment. Optimization, with the advantages of simple process, stable configuration and easy processing, so it can be widely used in various aspects

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