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A dynamically tunable multifunctional terahertz metamaterial device based on tini shape memory alloy thin films

A memory alloy and multifunctional technology, which is applied in the field of terahertz metamaterial functional devices, can solve the problems of single function, complex structure and limited control range of devices

Active Publication Date: 2022-02-08
HARBIN UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The present invention aims to solve the problems of complex structure, limited control range and single device function existing in existing terahertz metamaterials, and provides a dynamically adjustable multifunctional terahertz metamaterial device based on TiNi shape memory alloy thin film

Method used

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  • A dynamically tunable multifunctional terahertz metamaterial device based on tini shape memory alloy thin films
  • A dynamically tunable multifunctional terahertz metamaterial device based on tini shape memory alloy thin films
  • A dynamically tunable multifunctional terahertz metamaterial device based on tini shape memory alloy thin films

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specific Embodiment approach 1

[0021] Specific implementation mode one: as Figure 1 ~ Figure 3 As shown, a dynamically adjustable multifunctional terahertz metamaterial device based on a TiNi shape memory alloy thin film in this embodiment includes a substrate 1 and an split resonator ring structure thin film layer, and the split resonator ring structure thin film layer is arranged on the substrate The upper surface of the bottom 1; the split resonator structure film layer includes N×N split resonator structure periodic units, and the split resonator structure periodic unit includes a single split resonator structure 2 and is symmetrically arranged on the single split resonator structure 2. Two bendable arm structures 3 at the opening; the single-opening resonant ring structure 2 is square.

[0022] In this embodiment, the shape memory alloy (SMA) is one of the most typical metal smart materials, which realizes deformation recovery through martensitic phase transformation under the action of an external fi...

specific Embodiment approach 2

[0026] Embodiment 2: This embodiment differs from Embodiment 1 in that the substrate 1 is a low-doped high-resistance silicon substrate with a thickness of 5 μm and a dielectric constant of 11.86. Other steps and parameters are the same as in the first embodiment.

specific Embodiment approach 3

[0027] Embodiment 3: This embodiment differs from Embodiment 1 or Embodiment 2 in that: the material of the thin film layer of the split resonator ring structure is TiNi shape memory alloy. Other steps and parameters are the same as those in Embodiment 1 or 2.

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Abstract

A dynamically adjustable multifunctional terahertz metamaterial device based on TiNi shape memory alloy thin film. The invention relates to the field of terahertz metamaterial functional devices, in particular to a dynamically adjustable multifunctional terahertz metamaterial device based on a TiNi shape memory alloy thin film. The invention aims to solve the problems of complex structure, limited control range and single device function existing in the existing terahertz metamaterials. It includes a substrate and an split resonator ring structure thin film layer; the split resonator ring structure thin film layer includes N×N split resonator ring structure periodic units, and the split resonator ring structure periodic unit includes a single split resonator ring structure and a symmetrical arrangement Two bendable arm structures at the opening of a single split resonant ring structure. The invention is used for dynamically adjustable multifunctional terahertz metamaterial devices.

Description

technical field [0001] The invention relates to the field of terahertz metamaterial functional devices, in particular to a dynamically adjustable multifunctional terahertz metamaterial device based on a TiNi shape memory alloy thin film. Background technique [0002] Terahertz (THz) waves are a unique part of the electromagnetic spectrum that lies between microwaves and infrared, combining the advantages of both spectral regions. Due to its high-frequency field oscillation, low photon energy, high directionality, and high transparency in most material systems, it has broad applications in the fields of physical chemistry, material science, biomedicine, environmental science, safety inspection, and satellite communications. Application prospects. At present, the interaction between terahertz waves and natural materials is minimal, which directly leads to the lack of natural materials to regulate terahertz waves. Metamaterials (MMs), an artificial material composed of subwav...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01Q15/00
CPCH01Q15/0086
Inventor 张琨谭昌龙刘娟田晓华黄跃武赵文彬
Owner HARBIN UNIV OF SCI & TECH
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