Multifunctional terahertz metamaterial device capable of being dynamically regulated and controlled based on TiNi shape memory alloy film
A memory alloy, multi-functional technology, applied in the field of terahertz metamaterial functional devices, can solve the problems of limited control range, complex structure, and single device function.
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specific Embodiment approach 1
[0021] Specific implementation mode one: as Figure 1 ~ Figure 3 As shown, a dynamically adjustable multifunctional terahertz metamaterial device based on a TiNi shape memory alloy thin film in this embodiment includes a substrate 1 and an split resonator ring structure thin film layer, and the split resonator ring structure thin film layer is arranged on the substrate The upper surface of the bottom 1; the split resonator structure film layer includes N×N split resonator structure periodic units, and the split resonator structure periodic unit includes a single split resonator structure 2 and is symmetrically arranged on the single split resonator structure 2. Two bendable arm structures 3 at the opening; the single-opening resonant ring structure 2 is square.
[0022] In this embodiment, the shape memory alloy (SMA) is one of the most typical metal smart materials, which realizes deformation recovery through martensitic phase transformation under the action of an external fi...
specific Embodiment approach 2
[0026] Embodiment 2: This embodiment differs from Embodiment 1 in that the substrate 1 is a low-doped high-resistance silicon substrate with a thickness of 5 μm and a dielectric constant of 11.86. Other steps and parameters are the same as in the first embodiment.
specific Embodiment approach 3
[0027] Embodiment 3: This embodiment differs from Embodiment 1 or Embodiment 2 in that: the material of the thin film layer of the split resonator ring structure is TiNi shape memory alloy. Other steps and parameters are the same as those in Embodiment 1 or 2.
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