Multi-axis positioning device

Abstract

The invention discloses a multi-axis positioning device. The multi-axis positioning device comprises a rotary table assembly, a supporting base located below the rotary table assembly, multiple vertical driving devices sequentially arranged on the supporting base at intervals in the circumferential direction of the rotary table assembly, at least one floating gravity compensation device and a guide device. Each vertical driving device is used for driving the rotary table assembly to move vertically. The floating gravity compensation devices are arranged between the rotary table assembly and the supporting base and used for conducting gravity compensation on the rotary table assembly. The guide device is provided with flexible pieces, is arranged between the rotary table assembly and the supporting base, and is connected with the rotary table assembly and the supporting base. Compared with the prior art, the multi-axis positioning device is simple in structure, few in size chain and convenient to assemble.

Description

technical field [0001] Embodiments of the present invention relate to the technical field of integrated circuit equipment manufacturing, and in particular to a multi-axis positioning device. Background technique [0002] In recent years, with the continuous improvement of the integration level of large-scale integrated circuit devices, the accuracy requirements of the workpiece table have been continuously improved, especially the positioning accuracy of the vertical module, such as in lithography equipment, film thickness detection equipment and other fields. In the inspection of semiconductor wafers, due to the deflection of Rx, Ry and Z in the traditional vertical module, the wafer under test will also have a corresponding deflection. [0003] In Chinese patent CN1839348A and US patent US2005012920A1, a multi-axis positioning mechanism scheme is proposed. The positioning device of the invention is driven by three sets of 120° voice coil motors, and at the same time relie...

AI Technical Summary

Problems solved by technology

In this invention, due to the complex structure of the cam mechanism and many chains of intermediate dimensions, the vertical drive motor needs to bear the gravity of all the drive parts, and the motor generates serious heat, resulting in a decrease in vertical performance.

Moreover, the cam mechanism drives the cam to rotate through the friction of the rollers to achieve vertical movement, and it is difficult to avoid the generation of mechanical wear and particle dust

[0005] Therefore, a new multi-axis positioning device is needed at this stage, which can solve the problems of traditional positioning devices such as complex structure, many dimension chains, and difficult assembly.

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