Gas-magnetic hybrid bearing error compensation method based on electromagnetic force adjustment

An error compensation, gas-magnetic hybrid technology, applied in air-cushion bearings, bearings, shafts and bearings, etc., can solve the problems of complex control, high difficulty in manufacturing and low reliability of non-actively controlled gas static pressure support, and reduce the The effect of manufacturing difficulty, improving stiffness, and reducing errors

Active Publication Date: 2021-04-06
四川龙天精工科技有限公司
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Problems solved by technology

[0010] The technical problem to be solved by the present invention is to overcome the deficiencies of the prior art, and the purpose is to provide a gas-magnetic hybrid support error compensation method based on electromagnetic force adjustment to solve the problem of high manufacturing difficulty of the non-actively controlled gas static pressure support, closed-loop active Controlled Gas Static Pressure Support Structure and Its Control Complexity and Low Reliability

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  • Gas-magnetic hybrid bearing error compensation method based on electromagnetic force adjustment
  • Gas-magnetic hybrid bearing error compensation method based on electromagnetic force adjustment
  • Gas-magnetic hybrid bearing error compensation method based on electromagnetic force adjustment

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Embodiment

[0031] An error compensation method for an aeromagnetic hybrid support based on electromagnetic force adjustment, specifically an open-loop control method for an aeromagnetic hybrid support, performing static calibration and dynamic calibration in sequence, including the following steps:

[0032] 1) Static calibration

[0033] a. Drive the turntable or guide rail to various positions and keep it stationary;

[0034] b. Measure the stiffness of the air bearing point by point, and fit the smooth stiffness curve at multiple points, such as figure 1 shown;

[0035] c. Measure at least one of the rotation error, straightness error, and shaft pendulum error point by point, and fit the smooth error curve at multiple points, such as figure 2 shown;

[0036] d. According to the rotation error, straightness error, shaft pendulum error and stiffness of each position, the force-displacement conversion algorithm is adopted, the controller outputs the corresponding electromagnetic force...

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Abstract

The invention discloses a gas-magnetic hybrid bearing error compensation method based on electromagnetic force adjustment. According to the error and rigidity of each position, a controller outputs corresponding electromagnetic force to calibrate the error point by point. Compared with the prior art, the method has the following advantages and beneficial effects that in the whole effective stroke range, the calibration forces required by different positions are different, and error compensation is realized by measuring the error and rigidity point by point and adopting a certain force-displacement conversion algorithm; and on the premise of greatly reducing the manufacturing difficulty, the error is reduced, and the rigidity is improved.

Description

technical field [0001] The invention relates to an aeromagnetic hybrid support, in particular to an error compensation method for an aeromagnetic hybrid support based on electromagnetic force adjustment. Background technique [0002] In ultra-precision engineering applications such as ultra-precision machine tools, measuring instruments, and precision attitude adjustment mechanisms for large scientific devices, ultra-precision gas static pressure supports are required. In order to achieve ultra-high-precision control requirements, there are currently three technologies that can be realized during the project implementation process. [0003] 1) Gas static pressure support technology [0004] The use of ultra-precision gas static pressure support technology can achieve ultra-high precision control requirements. In terms of processing and manufacturing, it is necessary to grind the gas static pressure support functional components such as bearings and guide rails to extremely ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F16C32/04F16C32/06
CPCF16C32/0402F16C32/0451F16C32/0622F16C32/067
Inventor 杨涛刘敬坤刘梅
Owner 四川龙天精工科技有限公司
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