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Load Cell Elements for Use in Wet Water Environments

A load sensor and water environment technology, applied in the field of sensors, can solve problems such as load sensor element drop, load sensor element lag, bubble cracks, etc., to improve sensitivity and accuracy of measurement results, avoid strain transmission errors and pressure Affect problems, eliminate the effects of zero drift and creep

Active Publication Date: 2022-08-05
ZHEJIANG UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This phenomenon causes the adhesive to form air bubbles, which gradually build up and cause cracks, eventually causing the adhesive to fail and the load cell element to drop
In addition, because the adhesive is not a sensing element and is sensitive to environmental conditions, it will change due to the influence of time, temperature and pressure, so it is often the main factor causing errors such as hysteresis, zero drift and creep of the load cell element

Method used

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  • Load Cell Elements for Use in Wet Water Environments
  • Load Cell Elements for Use in Wet Water Environments

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0040] like figure 1 As well as figure 2 Show, a load sensor element for the humid water environment, including the base 1. The transition buffer layer on the surface of the base 2. The functional layer on the upper surface 4. The protective layer on the surface of the function layer 5; the base is made of 316L stainless steel material, the transition buffer layer is CRNI film, and the insulating layer is TIO TIO. 2 membrane. The functional layer is FeCRMN alloy film, and the protective layer is AL 2 O 3 membrane. Two lead 7 connect to the function layer through weld 6;

[0041] The preparation method of a load sensor element includes the following steps:

[0042] (3-1) Put the bases after pre-processing in the sputtering room of the magnetic sputter to fix and organize;

[0043] Use 400#, 600#, 800#, 1000#, 1500#, 2000#sandpaper to polish in order, and then use the 0.1 μm diamond spray polishing agent for mechanical polishing to make mark. The base with a smooth surface is placed...

Embodiment 2

[0058] The difference between this embodiment and Example 1 is:

[0059] The CRNI membrane is a transition buffer layer with a thickness of 500nm.

[0060] Pump the sputtering room to 5.0 × 10 -4 PA, the temperature of the substrate of the sample transfers to the substrate temperature of the sample to 300 ° C, adjust the partial pressure to 220 V, pass the sorbe to the splash room, control the gas flow of 50SCCM, increase the indoor air pressure in the splashing room, increase the indoor pressure To 2.0Pa, the voltage of the A target seat and B target seat rose to 310V for light discharge, so that the gas electrical ions were ionized, and the ion ions were bombarded with CR targets and NI targets, causing target sputtering; Adjust the indoor working air pressure to 0.6Pa for 15 minutes; after the sputtering process is stable, the voltage of the A target and B target seat stabilizes, and control the rotation speed of the sample transition to 5R / min, adjust the A target seat The vol...

Embodiment 3

[0063] The difference between this embodiment and Example 1 is:

[0064] TIO on the top of the CRNI film 2 The thickness of the membrane is 400nm, as TIO 2 Insulation;

[0065] Adjust the temperature controller of the spatter to make the substrate temperature of the sample rising to 400 ° C, and the oxygen flow is 10SCCM, so that AR: O 2 It is 0.2; turn on the radio frequency power supply, the air pressure in the splashing room during the sputtering process is 0.5Pa, the power of the C target seat during the sputtering process is 200W, and continuously splash 140min. 2 membrane;

[0066] The thickness of a splash grille -shaped FECRMN film on the cover table is 1000nm, as a functional layer;

[0067] The sputtering parameters in the process of sputtering FECRMN film are: Pump the sputtering room to be vacuum to 1.5 × 10 -4 PA, the temperature of the substrate is heated to 350 ° C, the plowing flow of 23SCCM, the air pressure in the sputtering room during the sputtering process is ...

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Abstract

The invention discloses a load sensor element used in a humid water environment, comprising a substrate, a transition buffer layer arranged on the upper surface of the substrate, an insulating layer arranged on the upper surface of the transition buffer layer, and a transition buffer layer arranged on the upper surface of the insulating layer. The functional layer and the protective layer on the upper surface of the functional layer; the base is made of 316L stainless steel, the transition buffer layer is CrNi film, and the insulating layer is TiO 2 film, the functional layer is FeCrMn alloy film, and the protective layer is Al 2 O 3 membrane. In the present invention, in the humid water environment, the load sensor element can be firmly fixed on the sample, and the connection between them is inorganic, thus eliminating zero point drift and creep, realizing temperature self-compensation, and improving the load sensor element. characteristics of the sensitivity and accuracy of the measurement results.

Description

Technical field [0001] The invention involves the field of sensor technology in the humid water environment, which specifically involves a CRNI film and TIO 2 Film, FECRMN film and al 2 O 3 The load sensor component for a membrane for the humid water environment. Background technique [0002] Nowadays, the rapid development of engineering technology has achieved construction in various severe environments, such as rock formations with more groundwater, marine surfaces, and bottom of the sea. In the humid environment / water environment, metals are prone to electrochemical corrosion and accompanied by cathode hydrogen analysis. For example, infrastructure and mechanical equipment such as steel structure bridges in humid areas are easy to absorb hydrogen absorption. The hydrogen and brimming of the material will cause the durability of the component, reduce the service life, affect data monitoring, and eventually cause accidents. While this causes huge economic losses, it also threat...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01L1/00C22C38/38C23C14/04C23C14/08C23C14/16C23C14/35C23C14/58
CPCG01L1/00C23C14/35C23C14/165C23C14/0036C23C14/083C22C38/38C23C14/5806C23C14/042C23C14/081
Inventor 俞海波张林张雯丽张万亮周成双
Owner ZHEJIANG UNIV OF TECH
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