In-tool ESD events monitoring method and apparatus
An event, device technology for ESD event monitoring in tools and devices to address issues such as limited performance, difficulty in ESD detector calibration, etc.
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[0030] In the description herein, numerous details are provided, such as examples of components, materials, portions, structures and / or methods, to provide a thorough understanding of embodiments of the invention. One skilled in the relevant art will recognize, however, that embodiments of the invention may be practiced without one or more of the details described, or may be practiced with other devices, systems, methods, components, materials, portions, structures, and the like. In other instances, well-known components, materials, parts, structures, methods, or operations have not been shown or described in detail to avoid obscuring aspects of the embodiments of the invention. In addition, the drawings are representative in nature and their shapes are not intended to show the precise shape or precise dimensions of any components and are not intended to limit the scope of the invention.
[0031] Those skilled in the art will understand that when a member or part in the drawin...
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