Piezoresistive composite tactile sensor and production method thereof

Abstract

The invention discloses a piezoresistive composite tactile sensor and a production method. The tactile sensor comprises a first electrode structure layer, a piezoelectric force sensitive structure layer is disposed below the first electrode structure layer, a second electrode structure layer is disposed below the piezoelectric force sensitive structure layer, and a flexible insulating layer is disposed below the second electrode structure layer. A third electrode structure layer is arranged below the flexible insulating layer, a piezoresistance force sensitive structure layer is arranged belowthe third electrode structure layer, and a fourth electrode structure layer is arranged below the piezoresistance force sensitive structure layer. The piezoelectric force sensitive structure layer and the piezoresistance force sensitive structure layer realize the perception of external dynamic and static tactile mechanical signals. According to the packaged composite tactile sensor, a second substrate layer is arranged on the first electrode structure layer, and a first substrate layer is arranged below the fourth electrode structure layer. The produced composite tactile sensor has piezoresistive and piezoelectric sensing mechanisms at the same time, measurement of multi-modal mechanical parameters is achieved, and the composite tactile sensor can be applied to the fields of flexible wearable devices, intelligent robots and the like.

Description

technical field [0001] The invention relates to the technical field of tactile sensors, in particular to a piezoresistive composite tactile sensor and a preparation method thereof. Background technique [0002] Inspired by the human skin’s perception of dynamic and static stimuli in the external environment by different neural units, the existing design of flexible tactile sensors uses piezoelectric force-sensitive layers and piezoresistive force-sensitive layers for dynamic force and Static force measurement to realize the measurement of tactile mechanical parameters. [0003] Tactile sensors are the most widely used flexible wearable devices. Most of the common flexible tactile sensors can only realize a single form of measurement mechanism. A piezoresistive sensor is used to measure dynamic force and static force at the same time, or a piezoelectric sensor is used for dynamic force measurement. force measurement. However, the measurement environment in the application f...

AI Technical Summary

Problems solved by technology

However, the measurement environment in the application fields such as flexible wearable devices and intelligent robots is relatively complex, requiring simultaneous measurement of static force and dynamic force, so as to obtain a more complete application of the mechanical parameters of the external environment in contact with the sensor. Piezoresistive or piezoelectric sensors do not meet the requirements

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