Piezoelectric micropump

Abstract

The invention provides a piezoelectric micropump. The piezoelectric micropump sequentially comprises a top cover, a piezoelectric ceramic module, a vibrating plate, a pump cavity assembly with a pressure bin, a first one-way valve and a second one-way valve, wherein the first one-way valve and the second one-way valve are provided with valve elements and micro-fluidic elements. According to the structure, the piezoelectric ceramic module is adopted for driving the volume change of the pressure bin, directional input and output of fluid are achieved through the first one-way valve and the second one-way valve, the volume can be miniaturized, carrying is convenient, the boiling point, viscosity and form of the fluid are not limited, and meanwhile the application range is enlarged; and the first one-way valve formed by bonding the first micro-fluidic element and the first valve element and the second one-way valve formed by bonding the second micro-fluidic element and the second valve element are designed and connected with the pressure bin in the pump cavity assembly, a first fluid channel and a second fluid channel, one-way input and output of fluid are achieved, the structure is simple and firm, preparation is easy, and the cost of the micropump is effectively reduced.

Description

technical field [0001] The invention relates to the technical fields of semiconductor integrated circuits and microfluidics, in particular to a piezoelectric micropump. Background technique [0002] Microfluidic technology is widely used in real-time medical monitoring and various biological and pharmaceutical research in colleges and universities. Gene chips and biochips based on microfluidic technology are widely used in DNA sequencing, pathological gene analysis, and drug response. analysis etc. In microfluidic technology, microfluidic chips are empty containers for chemical and biological reactions. The micropump is the power element that drives the fluid to overcome resistance and generate flow. It is the premise and basis for the realization of the microfluidic system. The performance of the micropump will directly affect the overall performance of the microfluidic analysis system, and it also determines the development level of microfluidic technology. The key facto...

AI Technical Summary

Problems solved by technology

[0005] In view of the above-mentioned shortcomings of the prior art, the purpose of the present invention is to provide a piezoelectric micropump, which is used to solve the problem that the volume of the micropump is miniaturized in the field of microfluidic technology in the prior art, and the scope of use is limited. It is limited to the boiling point and viscosity of the liquid and cannot control the gas. In addition, the structure of the micropump is complex and the preparation is difficult, resulting in high cost.

Images