Servo valve unit and machine
A servo valve, unit main body technology, applied in servo motors, servo meter circuits, servo motor components, etc., can solve problems such as reducing and unavoidable compressibility
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[0050] figure 1 A servo valve unit 2 and an air pressure control device 1 using the servo valve unit 2 according to one embodiment of the present invention are shown. The pneumatic control device 1 has a servo valve unit 2 , a pneumatic cylinder 40 and a controller 50 . The servo valve unit 2 has a valve body 10 formed with hollow spaces such as a common flow path 11 , a supply flow path 12 , an exhaust flow path 13 , and a drive flow path 14 . The unit main body 10 may be an assembly of a plurality of parts made of metal or plastic.
[0051] One end of the supply flow path 12 is connected to the common flow path 11 via a first valve portion 20R capable of pulse-like opening and closing based on the first electric pulse S1 . The other end of the supply channel 12 may have a connection portion (joint, etc.) 12a for connecting to a high-pressure air source such as a compressor for supplying high-pressure air S, an air tank, or the like. The connecting portion 12a may be form...
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