A passive wireless temperature sensor based on a mechanical metamaterial structure

Abstract

The invention provides a passive wireless temperature sensor based on a mechanical metamaterial structure. The temperature sensor includes: a substrate, and at least one temperature sensing unit and a strain sensing unit provided on the substrate. The strain sensing unit includes a mechanical metamaterial structure, LC A resonant circuit and a plurality of insulating supports; wherein the mechanical metamaterial structure is connected to at least one temperature sensing unit to receive a single-directional strain generated by the temperature sensing unit due to temperature changes, and convert the single-directional strain into a multi-directional strain Strain, the LC resonant circuit is connected to the mechanical metamaterial structure through multiple insulating supports to produce changes in resonant frequency under multi-directional strain, and the resonant frequency can be measured non-contactly through mutual inductance coupling to achieve temperature measurement. The invention adopts a passive wireless measurement method, so that the temperature sensor has low power consumption and is easy to measure. At the same time, it also has the advantages of simple structure, small measurement error, and process compatibility.

Description

technical field [0001] The invention belongs to the technical field of microelectronic devices, and in particular relates to a passive wireless temperature sensor based on a mechanical metamaterial structure. Background technique [0002] A temperature sensor is a sensor that converts changes in ambient temperature into electrical quantities. According to the principle, it can be divided into capacitive, resistive, thermocouple and MEMS temperature sensors. It is widely used in meteorological detection, industrial control, security alarms, etc. field. With the development of MEMS technology, temperature sensors tend to be miniaturized. Micro temperature sensor is a new type of temperature sensor manufactured by MEMS technology. Compared with traditional temperature sensors, micro temperature sensor has the advantages of small size, easy integration, low power consumption, and low cost. It is also indispensable for the realization of the Internet of Everything in an informat...

AI Technical Summary

Problems solved by technology

However, the current temperature sensor still has the defects of low sensitivity, large error and high power consumption

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