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A kind of laser ablation method and its device

A laser ablation, laser technology, used in measuring devices, laser welding equipment, instruments, etc., can solve problems such as host mineral interference

Active Publication Date: 2021-09-17
INST OF GEOCHEM CHINESE ACADEMY OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Therefore, the technical problem to be solved by the present invention is that the existing laser ablation system can only carry out gradual ablation from the surface to the inside, and will be interfered by host minerals, thereby providing a laser ablation method and its device

Method used

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  • A kind of laser ablation method and its device
  • A kind of laser ablation method and its device
  • A kind of laser ablation method and its device

Examples

Experimental program
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Effect test

Embodiment 1

[0047] This embodiment provides a laser ablation method, comprising the following steps:

[0048] S1, clean the sample to be tested, determine the position to be ablated, and then put it into the sample pool;

[0049] S2, using a nonlinear laser to ablate the sample, and the nonlinear laser focuses on the inside of the sample, and performs fixed-point focusing and blasting inside the sample.

[0050] Among them, the laser optical path is adjusted according to different samples. When performing ablation, the nonlinear laser pulse width is <1ns, the wavelength is <1100nm, the frequency is 1-50000Hz, the power is 0-15W, the ablation depth of the sample is 1-20μm, and the ablation time 5~40s.

[0051]S3, the whole course of the erosion process is observed through the camera and / or the eyepiece, and at the same time, the erosion signal can be collected through equipment such as an inductively coupled plasma mass spectrometer, and the erosion process and results can be analyzed.

...

Embodiment 2

[0054] The invention provides a nonlinear laser ablation device, such as figure 1 As shown, a nonlinear laser 2 is used as the laser source.

[0055] The laser ablation device includes a laser emitting assembly, an optical path system 4, an observation system 7, and an ablation pool 6. The nonlinear laser 1 emitted by the laser emitting assembly enters the ablation pool 6 after being adjusted by the optical path system 4, and the inside of the ablation pool 6 Laser ablation is performed on the sample, and then the sample in the ablation pool 6 is observed through the observation system 7 to observe the state of laser ablation.

[0056] Wherein, the laser emitting component includes a nonlinear laser 2 and an energy adjuster 3 for adjusting the energy of the nonlinear laser, and the energy adjuster 3 is arranged on one side of the nonlinear laser 2 . The nonlinear laser 2 can emit a nonlinear laser 1 , which generally can be a femtosecond laser or a picosecond laser, and the n...

Embodiment 3

[0075] In this example, the non-linear laser ablation device in Example 2 is used, and the ablation method in Example 1 is used to ablate the fluid inclusions in the sphalerite sample, as shown in the photo figure 2 As shown, the element signal diagram collected by inductively coupled plasma mass spectrometry when the sample is stripped is as follows image 3 shown.

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Abstract

The invention discloses a laser ablation method, which uses a nonlinear laser to ablate a sample. The invention also discloses a laser ablation device using the laser ablation method, which includes a laser emitting component for emitting nonlinear laser light, an optical path system for the nonlinear laser to pass through, and a device for ablation of samples by using the nonlinear laser. In the denudation pool. The present invention uses a nonlinear laser as a laser source, utilizes the self-focusing of the nonlinear laser to achieve a maximum power density at the focal point, so that the laser energy is concentrated at a specific depth in the sample. Based on nonlinear laser ablation, the present invention minimizes the impact of host mineral ablation on fluid inclusion analysis, and realizes high-precision analysis of fluid inclusion components.

Description

technical field [0001] The invention relates to the field of laser ablation analysis, in particular to a laser ablation method and a device thereof. Background technique [0002] Laser ablation-inductively coupled plasma mass spectrometry (LA-ICP-MS) can achieve micron-scale element-isotope measurement and high-precision in-situ determination of geological age, so it has become the most commonly used and most popular method in solid earth science research today. One of the cutting-edge analytical techniques. For the laser ablation-inductively coupled plasma mass spectrometry method, the principle is to use a laser generator to generate high-energy laser to act on the surface of geological samples to decompose the geological samples into fine particles, and then use carrier gas (such as helium) to remove the ablation particles to The aerosol form is transported to an inductively coupled plasma mass spectrometer, and the aerosol is ionized into ions by high-temperature plasma...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B23K26/36B23K26/03B23K26/064B23K26/14B23K26/70G01N27/62
CPCB23K26/032B23K26/14B23K26/36B23K26/064B23K26/702G01N27/626
Inventor 高剑峰
Owner INST OF GEOCHEM CHINESE ACADEMY OF SCI
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