On-Line Compensation Method and System for Phase Delay of Micromachined Gyro Interface Circuit

Abstract

The invention discloses an online real-time automatic compensation method for detecting the phase delay of a modal interface circuit of a micromachined gyroscope, and belongs to the field of the micromachined gyroscope. The invention is proposed under the general situation that the detection mode of the micromachined gyroscope is affected by the Coriolis angular velocity force, the in-phase zero bias and the orthogonal error force, and has generality and universality. The motion signal of the detection mode passes through the original measurement module. The original measurement output value and the synchronization auxiliary output value are obtained after the synchronization auxiliary module, and the real-time online compensation is carried out through the combined operation, so that the final measurement output signal is independent of the phase delay of the interface circuit, which reduces the measurement drift and instability of the micromachined gyroscope. The invention can automatically extract and compensate the delay phase of the circuit in real time without manual adjustment, reduce the cost of mass production of the micromachined gyroscope, and does not affect the normal measurement process; the extracted residual fluctuation value can also be used as a representation of the temperature of the micromachined gyroscope and compensating physical quantities.

Description

technical field [0001] The invention relates to the field of micromechanical gyroscopes, in particular to an on-line real-time automatic compensation method and system for detecting the phase delay of a modal interface circuit of a micromechanical gyroscope. Background technique [0002] The micromachined gyroscope is a sensor used to measure the external rotation angular velocity. The principle of measuring the angular velocity is based on the energy coupling and transfer between the driving mode and the detection mode. When the driving mode is similar to a resonator under the action of a phase-locked loop and automatic gain control loop and works in a resonant state, the externally input angular velocity will generate a Coriolis force along the motion direction of the detection mode, so that the The detection mode generates displacement motion signals on the detection axis. In order to reduce the influence of the coupling of the electrostatic force of the driving mode and...

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Problems solved by technology

[0004] The purpose of the present invention is to overcome the problem that the existing technology cannot automatically compensate the phase delay of the interface circuit in real time and accurately, which leads to the measurement drift and instability of the micro-mechanical gyroscope, and provides a micro-mechanical gyroscope for the detection mode of the micro-mechanical gyroscope. Online real-time automatic compensation method and system for interface circuit phase delay

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