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Lens angle adjusting device and adjusting method and photoetching machine

An angle adjustment device and an angle adjustment technology, which are applied in microlithography exposure equipment, photolithographic process exposure devices, installation, etc., can solve the problems of inflexible angle adjustment, low rotation accuracy, time-consuming and laborious, and improve adjustment flexibility. , The rotation angle is easy, and the effect of improving the installation stability

Inactive Publication Date: 2020-11-03
GIS TECH INC
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In the prior art, there are mainly the following three methods for adjusting the lens angle. First, the adjustment of the lens angle is achieved through an electronic control device, which is expensive; second, the adjustment is through a mechanical structure, but the structure is too complicated and the angle adjustment is not flexible enough. ; Third, rely on manual rotation, completely by feeling, without quantitative standards, time-consuming and labor-intensive, and the rotation accuracy is low

Method used

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  • Lens angle adjusting device and adjusting method and photoetching machine
  • Lens angle adjusting device and adjusting method and photoetching machine
  • Lens angle adjusting device and adjusting method and photoetching machine

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Embodiment Construction

[0039] In order to make the technical problems solved by the present invention, the technical solutions adopted and the technical effects achieved clearer, the technical solutions of the embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings. Obviously, the described embodiments are only the technical solutions of the present invention. Some, but not all, embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without making creative efforts belong to the protection scope of the present invention.

[0040] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected" and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integrated ; It can be a mechanical connection or an electrical connection; it can be a d...

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Abstract

The invention discloses a lens angle adjusting device, and adjusting method and a photoetching machine, and belongs to the technical field of lens adjustment. The lens angle adjusting device comprisesa supporting plate, a mounting frame, a fixed pin shaft, a rotary pin shaft and a first jackscrew, wherein one end of the mounting frame is used for mounting a lens, and the other end is provided with a flange connected with the support plate; the fixed pin shaft and the rotary pin shaft are both used for connecting the flange and the supporting plate, the fixed pin shaft is tightly matched withthe flange, and the rotary pin shaft is loosely matched with the flange; the first jackscrew is installed on the flange and can abut against the rotating pin shaft in the circumferential direction. According to the lens angle adjusting method, adjustment is carried out by adjusting the lens angle adjusting device. The photoetching machine comprises the lens angle adjusting device. According to thelens angle adjusting device and adjusting method and the photoetching machine, the first jackscrew is rotated to push the rotary pin shaft and drive the flange to rotate around the fixed pin shaft, so the lens angle is adjusted, and the adjusting efficiency, the adjusting precision and the adjusting flexibility are improved.

Description

technical field [0001] The invention relates to the technical field of lens adjustment, in particular to a lens angle adjustment device, an adjustment method and a photolithography machine. Background technique [0002] A photolithography machine is a device that projects the pattern on the mask onto the surface of the workpiece through a projection lens. When scanning, the lens needs to accurately correspond to the surface of the workpiece, and the exposure lens angle requires good stability and high precision, generally requiring an accuracy of 0.001°. In the prior art, there are mainly the following three methods for adjusting the angle of the lens. First, the adjustment of the angle of the lens is achieved through an electronic control device, which is costly. Second, the adjustment is through a mechanical structure, but the structure is too complicated and the angle adjustment is not flexible enough. ; Third, rely on manual rotation, completely by feeling, without quan...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/20G02B7/02
CPCG03F7/20G02B7/02
Inventor 于向前陈国军吴景舟马迪
Owner GIS TECH INC
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