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Capacitive mems gyroscope and its method of speeding up the vibration

A gyroscope and capacitive technology, which is applied to capacitive MEMS gyroscopes and the field of accelerating the start-up speed, can solve the problems of increasing the chip cost, increasing the driving electrode, increasing the maximum withstand voltage of the circuit, etc., to speed up the start-up speed and cost. Low, easy-to-achieve effects

Active Publication Date: 2022-04-05
SENODIA TECH (SHANGHAI) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Among them, increasing the capacitance of the driving electrode requires increasing the chip area, thereby increasing the cost of the chip; the maximum range of DC and AC voltages is limited by the processing technology of the driving circuit, and increasing the maximum withstand voltage of the circuit will significantly increase the processing complexity of the circuit chip and cost

Method used

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  • Capacitive mems gyroscope and its method of speeding up the vibration
  • Capacitive mems gyroscope and its method of speeding up the vibration

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Embodiment Construction

[0026] In describing the embodiments of the present invention, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top ", "Bottom", "Inner", "Outer", "Clockwise", "Counterclockwise" and other indicated orientations or positional relationships are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and Simplified descriptions, rather than indicating or implying that the device or element referred to must have a particular orientation, be constructed and operate in a particular orientation, and therefore should not be construed as limiting the invention. The attached drawings are schematic diagrams or conceptual diagrams, and the relationship between the thickness and width of each part, as well as the proportional relationship between each part, etc., are not completely consistent with their actual values.

[0027] figu...

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Abstract

The invention provides a capacitive MEMS gyroscope and a method for accelerating the vibration speed thereof, the capacitive MEMS gyroscope includes a substrate, a movable mass, a DC signal terminal, a ground wire, a first switch, and a second switch , the third switch; the DC signal terminal is electrically connected to the movable mass block through the first switch; the DC signal terminal is electrically connected to the substrate through the second switch; the DC signal terminal is sequentially passed through The second switch and the third switch are electrically connected to the ground wire; the substrate is electrically connected to the ground wire through the third switch.

Description

technical field [0001] The invention relates to the field of micro-electromechanical systems, in particular to a capacitive MEMS gyroscope and a method for accelerating the vibration speed. Background technique [0002] MEMS (Micro Electro Mechanical System, Micro Electro Mechanical System) devices have been more and more widely used in products such as consumer electronics, medical treatment, and automobiles due to their small size, low cost, and good integration. MEMS gyroscopes play a vital role in current camera anti-shake, drone attitude control, inertial navigation, air mouse and other applications. At present, MEMS gyroscopes on the market are classified according to their working principles. They are mainly piezoelectric and capacitive. Among them, capacitive gyroscopes have more advantages in miniaturization and integration, and are currently the mainstream technical route of MEMS gyroscopes. [0003] The main structure of capacitive MEMS gyroscope includes driving...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01C19/5747
CPCG01C19/5747
Inventor 邹波郭梅寒
Owner SENODIA TECH (SHANGHAI) CO LTD
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