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Synchronous polarization method for partitioned piezoelectric element

A piezoelectric element and electrode technology, which is applied in the field of synchronous polarization of partitioned piezoelectric elements, can solve problems such as the inability to control the polarization voltage intensity and polarization direction separately, difficulty in realizing the polarization of piezoelectric elements, and inconsistent polarization intensities of partitions. , to avoid electrode surface damage, avoid breakdown, and wide range of use

Active Publication Date: 2020-08-18
DALIAN UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, the polarization of piezoelectric materials usually uses a translation stage with a conductive probe to clamp and polarize the piezoelectric element, or covers the polarization with a planar electrode. These methods can only polarize a single segment of the piezoelectric element. However, for multiple Partitioned piezoelectric elements cannot be polarized synchronously at one time, and need to be polarized repeatedly
Repeated polarization will lead to thermal depolarization of the piezoelectric element, resulting in inconsistency in the polarization intensity of the partitions, and it is difficult to realize the polarization of the piezoelectric element in a hundred-micron-scale micro-section, let alone control the polarization voltage intensity and polarization of each partition independently. Direction, high cost and low efficiency of polarization equipment

Method used

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  • Synchronous polarization method for partitioned piezoelectric element
  • Synchronous polarization method for partitioned piezoelectric element
  • Synchronous polarization method for partitioned piezoelectric element

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Embodiment Construction

[0041] The present invention will be further described below in conjunction with technical solutions and accompanying drawings.

[0042] Such as Figure 1-Figure 4 As shown, the PC host computer 1 is connected to the high voltage generator 2 and the temperature control unit 7 to control the total output voltage of the high voltage generator 2 and the time variation curve of the polarization temperature. The high-voltage generator 2 is connected in parallel with the fixed end 19 of the voltage controller 3; the lower electrode connection plate 11 is connected with the sliding end 20 of one of the voltage controllers 3, and a high voltage is set to it; several elastic telescopic probes 13 are connected with the rest The sliding end 20 of the voltage controller 3 is connected, and the voltage output of the elastic telescopic probe 13 with different sizes is realized by adjusting the resistance of the voltage controller 3, and the output voltage acts on the required polarization t...

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Abstract

The invention discloses a synchronous polarization method for a partitioned piezoelectric element, and belongs to the technical field of polarization of materials with piezoelectric characteristics. According to the invention, the plurality of elastic telescopic probes are adopted to press the subarea polarization electrodes on the piezoelectric element, and the polarization subareas are enabled to obtain polarization voltages with different magnitudes and directions by controlling the relative voltage difference, so that one-time synchronous polarization of the subarea piezoelectric element is completed. According to the invention, the polarization efficiency is improved, and the problem of inconsistent thermal depolarization and partition polarization intensity of the piezoelectric element caused by repeated polarization is avoided. Polarization of hundreds of microns of micro areas is realized, the elastic telescopic probe is in more sufficient contact with the micro electrode, thepolarization process is more stable, electrode surface damage caused by uneven stress is avoided, and the problems of difficult operation, difficult positioning and the like when a traditional polarization method polarizes the micro multi-partition piezoelectric element are solved. Meanwhile, the PC upper computer is used for controlling the high-voltage generator and the temperature control unit,the polarization process is simplified, and the polarization quality is improved.

Description

technical field [0001] The invention belongs to the technical field of polarization of materials with piezoelectric characteristics, in particular to a method for synchronous polarization of partitioned piezoelectric elements. Background technique [0002] Piezoelectric elements have a special piezoelectric effect, which can realize the mutual conversion between mechanical vibration and electrical signals, and are widely produced into various high-performance piezoelectric devices. These devices have the characteristics of sensing, execution and control, and are widely used in medical Diagnosis, structural control, aerospace, weaponry and other fields have broad application prospects. [0003] Polarization is an important link to obtain piezoelectric properties of piezoelectric elements, and is the basis for realizing various functional characteristics of piezoelectric devices. Normally, polarization is a process in which a polarizing electric field is applied above the Cur...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L41/257H10N30/045
CPCH10N30/045
Inventor 王大志赵奎鹏袁钰恒王柱宗浩然梁军生
Owner DALIAN UNIV OF TECH
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